Patents by Inventor Menachem Genut

Menachem Genut has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser removal of foreign materials from surfaces
    Patent number: 6489590
    Abstract: A method of fast and complete laser removal of inorganic and organic foreign material, including particles down to submicron-sizes and atomic contaminants, such as heavy metals and alkaline elements, from a substrate without any damage to the substrate, carried out by UV laser irradiation of the substrate surface in a reactive oxygen based gas, which comprises carrying out the removal process in the presence of gas containing F and/or Cl atoms in its molecules.
    Type: Grant
    Filed: March 11, 1999
    Date of Patent: December 3, 2002
    Inventors: Boris Buyaner Livshits, Menachem Genut, Ofer Tehar-Zahav, Eliezer Iskevitch
  • Laser stripping improvement by modified gas composition
    Patent number: 6350391
    Abstract: A method and apparatus for accelerating a laser stripping process carried out in a reactive gas mixture, comprising carrying out the stripping process in the presence of an accelerating effective amount of NxOy gas.
    Type: Grant
    Filed: April 28, 1998
    Date of Patent: February 26, 2002
    Assignee: Oramir Semiconductor Equipment Ltd.
    Inventors: Boris Livshits, Menachem Genut, Ofer Tehar-Zahav
  • Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
    Patent number: 6265138
    Abstract: A process and apparatus for carrying out the removal of a coating substance from the sidewalls of a surface to be stripped comprising, providing a laser beam incidence on the surface at an incidence angle &agr; relative to the plane of the surface being treated, wherein the angle &agr;>0, and periodically switching or gradually changing the azimuth of the beam incidence plane.
    Type: Grant
    Filed: April 29, 1998
    Date of Patent: July 24, 2001
    Assignee: Oramir Semiconductor Equipment Ltd.
    Inventors: Menachem Genut, Boris Livshits (Buyaner), Ofer Tehar-Zahav, Eliezer Iskevitch
  • Laser processing chamber with cassette cell
    Patent number: 6123803
    Abstract: A process chamber for carrying out laser treatments, on the surface of an object, comprising: a base provided with object support means; a cover provided with a window substantially transmissive of laser light; gas inlet and gas outlet means; the said cover and the said base, when connected, leaving a space between the surface of the element and the inner surface of the window, in which gases flowing through the said gas inlet may flow above the surface of the object being treated and out of the process chamber through the said gas outlet.
    Type: Grant
    Filed: April 28, 1998
    Date of Patent: September 26, 2000
    Assignee: Oramir Semiconductor Equipment Ltd.
    Inventors: Menachem Genut, Boris Livshit (Buyaner), Ofer Tehar-Zahav