Abstract: A processing apparatus for overlay shift includes a storage unit and a control unit, and is applicable to a semiconductor wafer with several inspection regions. Each of the inspection regions has several sets of overlay marks for inspection. One set of overlay marks includes an original alignment mark without any overlay shift, and several split alignment marks with predetermined overlay shifts arranged near the original alignment mark. The original after-etch inspection (AEI) overlay data of the inspection regions is stored in the storage unit. The after-develop inspection (ADI) overlay data of the original alignment mark and the split alignment marks are compared with the original AEI overlay data by the control unit, thereby acquiring ADI pre-bias data of the original alignment mark and the split alignment marks. The control unit determines whether an overlay shift compensation is performed according to the acquired ADI pre-bias data.

Abstract: A transistor includes a first semiconductor layer, a second semiconductor layer, a semiconductor nanosheet, a gate electrode and source and drain electrodes. The semiconductor nanosheet is physically connected to the first semiconductor layer and the second semiconductor layer. The gate electrode wraps around the semiconductor nanosheet. The source and drain electrodes are disposed at opposite sides of the gate electrode. The first semiconductor layer surrounds the source electrode, the second semiconductor layer surrounds the drain electrode, and the semiconductor nanosheet is disposed between the source and drain electrodes.

Abstract: A system may include a memory and a processor in communication with the memory. The processor may be configured to perform operations. The operations may include synchronizing a policy between a primary node and a compute node and maintaining a resource registry on a client of the primary node. The operations may include communicating a direct communication between the client and the compute node, and the direct communication may include a first task. The operations may include returning a first result for the first task directly from the compute node to the client.

Abstract: A device for modulating and controlling the level of luminosity output by a lighting facility. The modulation may be of average current or voltage. The device modulates electrical power in a cyclical manner for input to the lighting facility, so that the resulting modulation of the luminosity output serves to exercise the eyes of persons exposed thereto. The average luminosity, and the amplitude and period of modulation can be set and adjusted by the user. The rate of modulation is sufficiently slow that the level of change of luminosity is accommodated by human eyes and is imperceptible through the eyes of persons exposed thereto. In one embodiment, an illuminance sensor is provided to read the actual illumination of a lighted object. The values of the illumination so read are fed back in the device to adjust the luminosity of the lighting facility, so that the object is illuminated in the desired cyclical manner.