Abstract: A semiconductor structure includes a first transistor, a second transistor, a metal rail, and a first source/drain contact and a second source/drain contact. The first transistor has a gate structure, a first source/drain feature, and a second source/drain feature. The first source/drain feature and the second source/drain feature are on opposite sides of the gate structure. The second transistor has the gate structure, a third source/drain feature directly over the first source/drain feature, and a fourth source/drain feature directly over the second source/drain feature. The metal rail extends in an X-direction and adjacent to the gate structure in a Y-direction. The first source/drain contact and the second source/drain contact each has an L-shape in a Y-Z cross-sectional view. The first source/drain contact electrically connects the first source/drain feature to the metal rail. The second source/drain contact electrically connects the fourth source/drain feature to the metal rail.

Abstract: An apparatus for producing a graphene material includes a tank, a container, an agitating module, a second electrode disposed in the tank, and a power supply module. The container is used for receiving a graphite material, and is formed with a plurality of through holes for the electrolyte solution to pass therethrough. The agitating module includes a control unit and an agitating unit used as a first electrode, and inserted into the container for agitating the electrolyte solution and the graphite material. The power supply module is electrically connected to the agitating unit and the second electrode for supplying electric power to generate an electrical potential difference.

Abstract: An apparatus for producing a graphene material includes a tank, a container, an agitating module, a second electrode disposed in the tank, and a power supply module. The container is used for receiving a graphite material, and is formed with a plurality of through holes for the electrolyte solution to pass therethrough. The agitating module includes a control unit and an agitating unit used as a first electrode, and inserted into the container for agitating the electrolyte solution and the graphite material. The power supply module is electrically connected to the agitating unit and the second electrode for supplying electric power to generate an electrical potential difference.