Patents by Inventor Meng-Jyun LIN

Meng-Jyun LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9581434
    Abstract: An apparatus for measuring pattern of a grating device is provided. In an embodiment, the apparatus comprises a light source unit, an image unit, a processing unit, and a movement unit. The light source unit irradiates to a surface of the grating device. The image unit acquires a plurality of first digital images including an image on the surface of the grating device and images due to Talbot effect between the surface and a first position with respect to the grating device. The image unit acquires a plurality of second digital images due to Talbot effect at a second position determined based on the first digital images when the movement unit produces a relative movement between the image unit and grating device. Based on the acquired digital images, analysis, inspection on the grating device, or comparison of the grating device with a reference grating scale, can be implemented optionally.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: February 28, 2017
    Assignee: NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: Jeng-Ywan Jeng, Mohammad Hossein Goudarzi Khouygani, Meng-Jyun Lin
  • Publication number: 20170003117
    Abstract: An apparatus for measuring pattern of a grating device is provided. In an embodiment, the apparatus comprises a light source unit, an image unit, a processing unit, and a movement unit. The light source unit irradiates to a surface of the grating device. The image unit acquires a plurality of first digital images including an image on the surface of the grating device and images due to Talbot effect between the surface and a first position with respect to the grating device. The image unit acquires a plurality of second digital images due to Talbot effect at a second position determined based on the first digital images when the movement unit produces a relative movement between the image unit and grating device. Based on the acquired digital images, analysis, inspection on the grating device, or comparison of the grating device with a reference grating scale, can be implemented optionally.
    Type: Application
    Filed: June 30, 2015
    Publication date: January 5, 2017
    Inventors: Jeng-Ywan JENG, Mohammad Hossein GOUDARZI KHOUYGANI, Meng-Jyun LIN