Patents by Inventor Meng-Tsung LIN

Meng-Tsung LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flexible linear sensor
    Patent number: 10490430
    Abstract: An apparatus includes: a sensor configured to produce a change in a parameter value when in contact with a liquid, wherein the sensor is flexibly linear and configured to traverse a path within a semiconductor processing system; and a controller configured to produce an alert signal based on the change in the parameter value.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: November 26, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Min-Chuan Hsiao, Meng-Tsung Lin, Chen-Wei Chen
  • FLEXIBLE LINEAR SENSOR
    Publication number: 20190131151
    Abstract: An apparatus includes: a sensor configured to produce a change in a parameter value when in contact with a liquid, wherein the sensor is flexibly linear and configured to traverse a path within a semiconductor processing system; and a controller configured to produce an alert signal based on the change in the parameter value.
    Type: Application
    Filed: October 30, 2017
    Publication date: May 2, 2019
    Inventors: Min-Chuan HSIAO, Meng-Tsung LIN, Alex CHENG