Patents by Inventor Mengyan Shen

Mengyan Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10741399
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: August 11, 2020
    Assignee: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 10361083
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: August 26, 2015
    Date of Patent: July 23, 2019
    Assignee: President and Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20180182630
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: February 14, 2018
    Publication date: June 28, 2018
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20170282147
    Abstract: Nanostructured arrays having a metal catalyst (e.g., cobalt) are irradiated with light to initiate the an artificial photosynthetic reaction resulting in the formation of carbon-containing molecules, for example, long chained hydrocarbons or amino acids. A nanostructure having one or more structural elements having a high aspect ratio can formed over a substrate and are placed in contact with water and a carbon-containing source (e.g., carbon dioxide, bicarbonate, methane). When the nanostructure is exposed to light, the water and the carbon-containing source can react to form a molecule having at least two carbon atoms chained together. Structural elements may include a number of metal layers arranged in a patterned configuration so that, upon light irradiation, a greater amount of light energy is concentrated in close proximity to the region where the reaction is catalyzed than for the case without the patterned configuration.
    Type: Application
    Filed: June 12, 2017
    Publication date: October 5, 2017
    Applicant: University of Massachusetts
    Inventors: Mengyan Shen, Cong Wang
  • Publication number: 20170133525
    Abstract: The invention provides a novel method for fabrication of IR-absorbing silicon substrate in ambient atmosphere without the need for special background gases, and compositions and methods of preparation and use thereof.
    Type: Application
    Filed: November 9, 2016
    Publication date: May 11, 2017
    Inventors: Mengyan Shen, Qinghua Zhu
  • Publication number: 20160005608
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: August 26, 2015
    Publication date: January 7, 2016
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 9136146
    Abstract: The present invention generally provides semiconductor substrates having submicronsized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: September 15, 2015
    Assignee: President And Fellows Of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20140060737
    Abstract: The present invention generally provides semiconductor substrates having submicronsized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: November 6, 2013
    Publication date: March 6, 2014
    Applicant: President & Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 8598051
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: February 4, 2011
    Date of Patent: December 3, 2013
    Assignee: President and Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20120145989
    Abstract: In one aspect, the present invention provides a method of processing a substrate, e.g., a semiconductor substrate, by irradiating a surface of the substrate (or at least a portion of the surface) with a first set of polarized short laser pulses while exposing the surface to a fluid to generate a plurality of structures on the surface, e.g., within a top layer of the surface. Subsequently, the structured surface can be irradiated with another set of polarized short laser pulses having a different polarization than that of the initial set while exposing the structured surface to a fluid, e.g., the same fluid initially utilized to form the structured surface or a different fluid. In many embodiments, the second set of polarized laser pulses cause the surface structures formed by the first set to break up into smaller-sized structures, e.g., nano-sized features such as nano-sized rods.
    Type: Application
    Filed: February 15, 2012
    Publication date: June 14, 2012
    Applicant: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20120097521
    Abstract: Nanostructured arrays having a metal catalyst (e.g., cobalt) are irradiated with light to initiate the an artificial photosynthetic reaction resulting in the formation of carbon-containing molecules, for example, long chained hydrocarbons or amino acids. A nanostructure having one or more structural elements having a high aspect ratio can formed over a substrate and are placed in contact with water and a carbon-containing source (e.g., carbon dioxide, bicarbonate, methane). When the nanostructure is exposed to light, the water and the carbon-containing source can react to form a molecule having at least two carbon atoms chained together. Structural elements may include a number of metal layers arranged in a patterned configuration so that, upon light irradiation, a greater amount of light energy is concentrated in close proximity to the region where the reaction is catalyzed than for the case without the patterned configuration.
    Type: Application
    Filed: October 25, 2011
    Publication date: April 26, 2012
    Applicant: University of Massachusetts
    Inventors: Mengyan Shen, Cong Wang
  • Patent number: 8143686
    Abstract: In one aspect, the present invention provides a method of processing a substrate, e.g., a semiconductor substrate, by irradiating a surface of the substrate (or at least a portion of the surface) with a first set of polarized short laser pulses while exposing the surface to a fluid to generate a plurality of structures on the surface, e.g., within a top layer of the surface. Subsequently, the structured surface can be irradiated with another set of polarized short laser pulses having a different polarization than that of the initial set while exposing the structured surface to a fluid, e.g., the same fluid initially utilized to form the structured surface or a different fluid. In many embodiments, the second set of polarized laser pulses cause the surface structures formed by the first set to break up into smaller-sized structures, e.g., nano-sized features such as nano-sized rods.
    Type: Grant
    Filed: October 18, 2010
    Date of Patent: March 27, 2012
    Assignee: President and Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20110121206
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: February 4, 2011
    Publication date: May 26, 2011
    Applicant: PRESIDENT & FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20110031471
    Abstract: In one aspect, the present invention provides a method of processing a substrate, e.g., a semiconductor substrate, by irradiating a surface of the substrate (or at least a portion of the surface) with a first set of polarized short laser pulses while exposing the surface to a fluid to generate a plurality of structures on the surface, e.g., within a top layer of the surface. Subsequently, the structured surface can be irradiated with another set of polarized short laser pulses having a different polarization than that of the initial set while exposing the structured surface to a fluid, e.g., the same fluid initially utilized to form the structured surface or a different fluid. In many embodiments, the second set of polarized laser pulses cause the surface structures formed by the first set to break up into smaller-sized structures, e.g., nano-sized features such as nano-sized rods.
    Type: Application
    Filed: October 18, 2010
    Publication date: February 10, 2011
    Applicant: PRESIDENT & FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 7884446
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: February 8, 2011
    Assignee: President & Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 7816220
    Abstract: In one aspect, the present invention provides a method of processing a substrate, e.g., a semiconductor substrate, by irradiating a surface of the substrate (or at least a portion of the surface) with a first set of polarized short laser pulses while exposing the surface to a fluid to generate a plurality of structures on the surface, e.g., within a top layer of the surface. Subsequently, the structured surface can be irradiated with another set of polarized short laser pulses having a different polarization than that of the initial set while exposing the structured surface to a fluid, e.g., the same fluid initially utilized to form the structured surface or a different fluid. In many embodiments, the second set of polarized laser pulses cause the surface structures formed by the first set to break up into smaller-sized structures, e.g., nano-sized features such as nano-sized rods.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: October 19, 2010
    Assignee: President & Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20090213883
    Abstract: In one aspect, the present invention provides a method of processing a substrate, e.g., a semiconductor substrate, by irradiating a surface of the substrate (or at least a portion of the surface) with a first set of polarized short laser pulses while exposing the surface to a fluid to generate a plurality of structures on the surface, e.g., within a top layer of the surface. Subsequently, the structured surface can be irradiated with another set of polarized short laser pulses having a different polarization than that of the initial set while exposing the structured surface to a fluid, e.g., the same fluid initially utilized to form the structured surface or a different fluid. In many embodiments, the second set of polarized laser pulses cause the surface structures formed by the first set to break up into smaller-sized structures, e.g., nano-sized features such as nano-sized rods.
    Type: Application
    Filed: February 27, 2008
    Publication date: August 27, 2009
    Applicant: PRESIDENT & FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20090014842
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: September 22, 2008
    Publication date: January 15, 2009
    Applicant: PRESIDENT & FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen
  • Patent number: 7442629
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: October 28, 2008
    Assignee: President & Fellows of Harvard College
    Inventors: Eric Mazur, Mengyan Shen
  • Publication number: 20060079062
    Abstract: The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
    Type: Application
    Filed: August 4, 2005
    Publication date: April 13, 2006
    Applicant: PRESIDENT & FELLOWS OF HARVARD COLLEGE
    Inventors: Eric Mazur, Mengyan Shen