Patents by Inventor Meng yiau YU

Meng yiau YU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit
    Patent number: 9541920
    Abstract: In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.
    Type: Grant
    Filed: October 1, 2013
    Date of Patent: January 10, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Masato Kubodera, Hirohito Kikushima, Hirofumi Yamaguchi, Yoshiaki Sasaki, Meng yiau Yu
  • METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSITIONAL DEVIATION AMOUNT OF AN OBJECT TO BE PROCESSED, AND METHOD FOR CORRECTING TEACHING DATA OF THE TRANSFER UNIT
    Publication number: 20140107825
    Abstract: In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.
    Type: Application
    Filed: October 1, 2013
    Publication date: April 17, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masato KUBODERA, Hirohito KIKUSHIMA, Hirofumi YAMAGUCHI, Yoshiaki SASAKI, Meng yiau YU