Abstract: A method of manufacturing the TFT array substrate includes steps of: forming a first electrically conductive layer on the substrate, the first electrically conductive layer including a first electrically conductive pattern and a first signal line connected electrically to the first electrically conductive pattern located in a pixel region, and a first lead wire connected electrically to the first signal line; forming an insulation layer on the substrate formed with the first electrically conductive layer, the insulation layer including a first via-hole through which the first lead wire is exposed; and forming a second electrically conductive film on the substrate formed with the insulation layer, the second electrically conductive film being connected electrically to the first lead wire through the first via-hole in the insulation layer.

Abstract: The invention discloses a coating method, a coating device and a coating system. The coating method comprises: collecting a thickness data of a film on inner walls of a coating chamber; and processing the thickness data to obtain the thickness of the film on the inner walls of the coating chamber. With the coating method, the cleaning for the coating device gets smarter, the troublesome of artificially controlling the cleaning in the prior art is eliminated and thus the cleaning efficiency for the coating device is improved.

Abstract: A method of manufacturing the TFT array substrate includes steps of: forming a first electrically conductive layer on the substrate, the first electrically conductive layer including a first electrically conductive pattern and a first signal line connected electrically to the first electrically conductive pattern located in a pixel region, and a first lead wire connected electrically to the first signal line; forming an insulation layer on the substrate formed with the first electrically conductive layer, the insulation layer including a first via-hole through which the first lead wire is exposed; and forming a second electrically conductive film on the substrate formed with the insulation layer, the second electrically conductive film being connected electrically to the first lead wire through the first via-hole in the insulation layer.

Abstract: The invention discloses a coating method, a coating device and a coating system. The coating method comprises: collecting a thickness data of a film on inner walls of a coating chamber; and processing the thickness data to obtain the thickness of the film on the inner walls of the coating chamber. With the coating method, the cleaning for the coating device gets smarter, the troublesome of artificially controlling the cleaning in the prior art is eliminated and thus the cleaning efficiency for the coating device is improved.