Patents by Inventor Mervyn I. Hopson

Mervyn I. Hopson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Environmental parameter measurement device and method for laser interferometry
    Patent number: 5920392
    Abstract: An environmental metrology device (10) containing sensor (12) elements which include a pressure sensor (20), a temperature sensor (22), and a humidity sensor (24) all located in close proximity within a housing (18). Control circuitry (16) is further provided to direct operation of the sensors (12) and to communicate with an interferometer controller (42) via a signal port (14) and a cable (92). Additional instances of the device (10) may be connected in a daisy-chain network configuration via additional signal ports (14) and cables (90). One or more instances of the device (10) permit highly localized characterization of atmospheric index of refraction in the measurement region (60) of a laser interferometer (30). The interferometer controller (42) is thereby able to compensate measurements performed by the laser interferometer (30) before they are passed onto manufacturing process controls (48).
    Type: Grant
    Filed: December 22, 1997
    Date of Patent: July 6, 1999
    Assignee: Excel Precision, Inc.
    Inventors: John C. Tsai, Mervyn I. Hopson