Abstract: A fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element with a peripheral edge section is fixed to the device housing in a fluid-tight manner and has a membrane working section which is framed by the peripheral edge section and which for the change of the volume of the fluid chamber can be elastically deflected by a piezoactuator. The membrane element consists of a rubber-elastic material, wherein the piezoactuator comprises a drive section which extends along the membrane working section, is embedded into the membrane element and is enveloped by the rubber-elastic material of the membrane element.

Abstract: A fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element with a peripheral edge section is fixed to the device housing in a fluid-tight manner and has a membrane working section which is framed by the peripheral edge section and which for the change of the volume of the fluid chamber can be elastically deflected by a piezoactuator. The membrane element consists of a rubber-elastic material, wherein the piezoactuator comprises a drive section which extends along the membrane working section, is embedded into the membrane element and is enveloped by the rubber-elastic material of the membrane element.

Abstract: The invention relates to a method for producing a coil integrated in a substrate or applied to a substrate, wherein the coil has first winding portions, which each have first ends and second ends, and wherein the coil has second winding portions and third winding portions, wherein each two of the first ends are electrically interconnected by the second winding portions and two corresponding second ends of the first winding portions are electrically interconnected by the third winding portions, such that coil windings of the coil are formed hereby, wherein at least the first winding portions are applied by means of a 3D printing method, wherein this is aerosol jet or inkjet printing, for example.

Abstract: The subject matter of the invention relates to a method of producing a coil integrated in a substrate, using the following steps: creating the cavity in a substrate, said cavity having an open end which interrupts a surface of the substrate, introducing a paste containing ferromagnetic particles into the cavity so as to produce a coil core, closing the cavity by applying a cover layer so as to bridge the interruption in the surface of the substrate, introducing first winding portions of the coil which are vertical with respect to the surface, with a plurality or all of the first winding portions passing through the coil core contained inside the cavity, and applying second winding portions of the coil onto the surfaces of the substrate, with the second winding portions contacting the first winding portions so as to create the windings of the coil.

Abstract: The subject matter of the invention relates to a method of producing a coil integrated in a substrate, using the following steps: creating the cavity in a substrate, said cavity having an open end which interrupts a surface of the substrate, introducing a paste containing ferromagnetic particles into the cavity so as to produce a coil core, closing the cavity by applying a cover layer so as to bridge the interruption in the surface of the substrate, introducing first winding portions of the coil which are vertical with respect to the surface, with a plurality or all of the first winding portions passing through the coil core contained inside the cavity, and applying second winding portions of the coil onto the surfaces of the substrate, with the second winding portions contacting the first winding portions so as to create the windings of the coil.

Abstract: The invention relates to a method for producing a coil integrated in a substrate or applied to a substrate, wherein the coil has first winding portions, which each have first ends and second ends, and wherein the coil has second winding portions and third winding portions, wherein each two of the first ends are electrically interconnected by the second winding portions and two corresponding second ends of the first winding portions are electrically interconnected by the third winding portions, such that coil windings of the coil are formed hereby, wherein at least the first winding portions are applied by means of a 3D printing method, wherein this is aerosol jet or inkjet printing, for example.

Abstract: The invention relates to a method for producing a coil (140) integrated in a substrate (100) or applied to a substrate, wherein the coil has first winding portions (136), which each have first ends (141) and second ends (147), and wherein the coil has second winding portions (138) and third winding portions (139), wherein each two of the first ends are electrically interconnected by the second winding portions and two corresponding second ends of the first winding portions are electrically interconnected by the third winding portions, such that coil windings of the coil are formed hereby, wherein at least the first winding portions are applied by means of a 3D printing method, wherein this is aerosol jet or inkjet printing, for example.

Abstract: The application relates to a device in accordance with fluid technology (1), having at least one connecting body (2), through which at least one fluid-carrying conduit (5) extends and to which an elastic fluid-carrying hose (3) can be connected by means of a connecting arrangement (16). The connecting arrangement (16) contains a holding slide (25), which is displaceably seated on the connecting body (2) and through which a pass-through opening (32) extends, which has an insertion section (33) and a holding section (34), which is narrower than the latter. The connected fluid-carrying hose (3) itself has been directly inserted through the pass-through opening (32) of the holding slide (25) into the fluid-carrying conduit (5).

Abstract: The application relates to a device in accordance with fluid technology (1), having at least one connecting body (2), through which at least one fluid-carrying conduit (5) extends and to which an elastic fluid-carrying hose (3) can be connected by means of a connecting arrangement (16). The connecting arrangement (16) contains a holding slide (25), which is displaceably seated on the connecting body (2) and through which a pass-through opening (32) extends, which has an insertion section (33) and a holding section (34), which is narrower than the latter. The connected fluid-carrying hose (3) itself has been directly inserted through the pass-through opening (32) of the holding slide (25) into the fluid-carrying conduit (5).

Abstract: An electrostatic microvalve has a partition dividing a first and a second valve chamber from each other and having a through duct extending through it, such through duct opening at a first and a second opening into the first and the second valve chamber. In the first valve chamber there is a valve member for the control of first duct opening.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator includes a free-standing oscillating structure having a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.

Abstract: A valve means having at least one microvalve secured in a substrate structure. For holding it in position the microvalve is clamped in rubber-elastic substrate material of the substrate structure. As a result simple and economic fitting of the valve is possible.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.

Abstract: There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.

Abstract: An electrostatic microvalve has a partition dividing a first and a second valve chamber from each other and having a through duct extending through it, such through duct opening at a first and a second opening into the first and the second valve chamber. In the first valve chamber there is a valve member for the control of first duct opening.

Abstract: There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit.

Abstract: A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.

Abstract: There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit.

Abstract: An electromechanical component consists of a polymeric body comprising a mechanically active part with a spring and a frame, and of a metal layer which encompasses the spring substantially completely so as to mechanically stabilize the same. The electromechanical component can be an acceleration sensor, a rotary speed sensor, a microvalve, a micropump, a pressure sensor, or a force sensor. Production of said electromechanical component incurs drastically reduced costs compared to electromechanical components produced using silicon-based technology because simple injection-moulding and/or embossing processes, instead of the complicated silicon-based technology, can be used for producing said electromechanical component.

Abstract: A microvalve comprising a valve chamber defined by a housing, the valve chamber being connected with housing openings constituting fluid ducts. Within the valve chamber a valve member is arranged, which consists of an elongated actuator element secured at one point to the housing and on which at least one electrical conductor is applied, whose coefficient of thermal expansion, different to that of the actuator element, causes deflection of the valve member into at least one position. The top actuator element is manufactured of a plastic material.