Patents by Inventor Mi Jeong LIM

Mi Jeong LIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective mask and method of fabricating the same
    Patent number: 9612524
    Abstract: A reflective mask includes a first reflection layer disposed on a mask substrate, a first capping layer disposed on the first reflection layer, a second reflection pattern disposed on a portion of the first capping layer, and a phase shifter disposed between the second reflection pattern and the first capping layer to cause a phase difference between a first light reflecting from the first reflection layer and a second light reflecting from the second reflection pattern. Related methods are also provided.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: April 4, 2017
    Assignee: SK Hynix Inc.
    Inventors: In Hwan Lee, Sun Young Koo, Seo Min Kim, Yong Dae Kim, Jin Soo Kim, Byung Hoon Lee, Mi Jeong Lim, Chang Moon Lim, Tae Joong Ha, Yoon Suk Hyun
  • REFLECTIVE MASK AND METHOD OF FABRICATING THE SAME
    Publication number: 20160209741
    Abstract: A reflective mask includes a first reflection layer disposed on a mask substrate, a first capping layer disposed on the first reflection layer, a second reflection pattern disposed on a portion of the first capping layer, and a phase shifter disposed between the second reflection pattern and the first capping layer to cause a phase difference between a first light reflecting from the first reflection layer and a second light reflecting from the second reflection pattern. Related methods are also provided.
    Type: Application
    Filed: June 10, 2015
    Publication date: July 21, 2016
    Inventors: In Hwan LEE, Sun Young KOO, Seo Min KIM, Yong Dae KIM, Jin Soo KIM, Byung Hoon LEE, Mi Jeong LIM, Chang Moon LIM, Tae Joong HA, Yoon Suk HYUN