Patents by Inventor Mi Ta PARK

Mi Ta PARK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLARIZATION ANALYSIS APPARATUS AND METHOD FOR ADJUSTING ANGLE OF INCIDENCE OR NUMERICAL APERTURE USING APERTURE
    Publication number: 20230375411
    Abstract: There is provided a polarization analysis apparatus that adjusts an angle of incidence or a numerical aperture by using an aperture. The apparatus includes: a first aperture that transmits a lighting beam reflected from a sample on a substrate; a second aperture that transmits a lighting beam having passed through the first aperture; and a detector that detects a lighting beam having passed through the second aperture and selects an angle of incidence of the lighting beam and numerical apertures of the first aperture and the second aperture.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 23, 2023
    Applicant: AUROS TECHNOLOGY, INC.
    Inventors: Mi Ta PARK, Jae Jun LEE