Patents by Inventor Miao Chih Hsu

Miao Chih Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9553047
    Abstract: Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. A method may incorporate the patterning of the array and periphery regions in self-aligned quadruple patterning and provide semiconductor devices resulting from the combined patterning.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: January 24, 2017
    Assignee: Macronix International Co., Ltd.
    Inventors: Yu-Min Hung, Tzung-Ting Han, Miao-Chih Hsu
  • Publication number: 20160365311
    Abstract: Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. A method may incorporate the patterning of the array and periphery regions in self-aligned double patterning and provide semiconductor devices resulting from the combined patterning.
    Type: Application
    Filed: June 10, 2015
    Publication date: December 15, 2016
    Inventors: Yu-Min HUNG, Tzung-Ting HAN, Miao-Chih HSU
  • Publication number: 20160365310
    Abstract: Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. A method may incorporate the patterning of the array and periphery regions in self-aligned quadruple patterning and provide semiconductor devices resulting from the combined patterning.
    Type: Application
    Filed: June 10, 2015
    Publication date: December 15, 2016
    Inventors: Yu-Min HUNG, Tzung-Ting HAN, Miao-Chih HSU
  • Patent number: 8836004
    Abstract: A memory device including a substrate, a conductive layer, a charge storage layer, first and second dopant regions and first and second cell dopant regions is provided. A plurality of trenches is deployed in the substrate. The conductive layer is disposed on the substrate and fills the trenches. The charge storage layer is disposed between the substrate and the conductive layer. The first and second dopant regions having a first conductive type are configured in the substrate under bottoms of the trenches and in an upper portion of the substrate between two adjacent trenches, respectively. The first and second cell dopant regions having a second conductive type are configured in the substrate between lower portions of side surfaces of the trenches and in the substrate adjacent to the bottoms of the second dopant regions, respectively. The first and the second conductive types are different dopant types.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: September 16, 2014
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yu-Fong Huang, I-Shen Tsai, Shang-Wei Lin, Miao-Chih Hsu, Kuan-Fu Chen
  • Patent number: 8779500
    Abstract: A memory device is provided, including a substrate, a conductive layer, a charge storage layer, a plurality of isolation structures, a plurality of first doped regions, and a plurality of second doped regions. The substrate has a plurality of trenches. The conductive layer is disposed on the substrate and fills the trenches. The charge storage layer is disposed between the substrate and the conductive layer. The isolation structures are disposed in the substrate between two adjacent trenches, respectively. The first doped regions are disposed in an upper portion of the substrate between each isolation structure and each trench, respectively. The second doped regions are disposed in the substrate under a bottom portion of the trenches, in which each isolation structure is disposed between two adjacent second doped regions.
    Type: Grant
    Filed: January 22, 2010
    Date of Patent: July 15, 2014
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yu-Fong Huang, Miao-Chih Hsu, Kuan-Fu Chen, Tzung-Ting Han
  • Patent number: 8391063
    Abstract: A method of operating a memory cell is provided. The memory cell has first, second, third and fourth storage regions in a charge-storage layer between a substrate and a word line. The first and second storage regions are respectively adjacent to lower and upper portions at one side of the protruding part of the substrate, and the third and fourth storage regions are respectively adjacent to lower and upper portions at the other side of the same. The second and third storage regions are regarded as a top storage region. When the top storage region is programmed, a first positive voltage is applied to the word line, a second positive voltage is applied to a top bit line in a top portion of the protruding part, and a bottom voltage is applied to first and second bottom bit lines in the substrate beside the protruding part respectively.
    Type: Grant
    Filed: July 13, 2010
    Date of Patent: March 5, 2013
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yu-Fong Huang, Teng-Hao Yeh, Miao-Chih Hsu, Tzung-Ting Han
  • Publication number: 20110255350
    Abstract: A method of operating a memory cell is provided. The memory cell has first, second, third and fourth storage regions in a charge-storage layer between a substrate and a word line. The first and second storage regions are respectively adjacent to lower and upper portions at one side of the protruding part of the substrate, and the third and fourth storage regions are respectively adjacent to lower and upper portions at the other side of the same. The second and third storage regions are regarded as a top storage region. When the top storage region is programmed, a first positive voltage is applied to the word line, a second positive voltage is applied to a top bit line in a top portion of the protruding part, and a bottom voltage is applied to first and second bottom bit lines in the substrate beside the protruding part respectively.
    Type: Application
    Filed: July 13, 2010
    Publication date: October 20, 2011
    Applicant: MACRONIX International Co., Ltd.
    Inventors: Yu-Fon Huang, Teng-Hao Yeh, Miao-Chih Hsu, Tzung-Ting Han
  • Publication number: 20110220986
    Abstract: A memory device including a substrate, a conductive layer, a charge storage layer, first and second dopant regions and first and second cell dopant regions is provided. A plurality of trenches is deployed in the substrate. The conductive layer is disposed on the substrate and fills the trenches. The charge storage layer is disposed between the substrate and the conductive layer. The first and second dopant regions having a first conductive type are configured in the substrate under bottoms of the trenches and in an upper portion of the substrate between two adjacent trenches, respectively. The first and second cell dopant regions having a second conductive type are configured in the substrate between lower portions of side surfaces of the trenches and in the substrate adjacent to the bottoms of the second dopant regions, respectively. The first and the second conductive types are different dopant types.
    Type: Application
    Filed: March 15, 2010
    Publication date: September 15, 2011
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yu-Fong Huang, I-Shen Tsai, Shang-Wei Lin, Miao-Chih Hsu, Kuan-Fu Chen
  • Publication number: 20110180864
    Abstract: A memory device is provided, including a substrate, a conductive layer, a charge storage layer, a plurality of isolation structures, a plurality of first doped regions, and a plurality of second doped regions. The substrate has a plurality of trenches. The conductive layer is disposed on the substrate and fills the trenches. The charge storage layer is disposed between the substrate and the conductive layer. The isolation structures are disposed in the substrate between two adjacent trenches, respectively. The first doped regions are disposed in an upper portion of the substrate between each isolation structure and each trench, respectively. The second doped regions are disposed in the substrate under a bottom portion of the trenches, in which each isolation structure is disposed between two adjacent second doped regions.
    Type: Application
    Filed: January 22, 2010
    Publication date: July 28, 2011
    Applicant: MACRONIX International Co., Ltd.
    Inventors: YU-FONG HUANG, Miao-Chih Hsu, Kuan-Fu Chen, Tzung-Ting Han
  • Patent number: 7666784
    Abstract: Methods of contact formation and memory arrays formed using such methods, which methods include providing a substrate having a contacting area; forming a plurality of line-shape structures extending in a first direction; forming a hard mask spacer beside the line-shape structure; forming an insulating material layer above the hard mask spacer; forming a contiguous trench in the insulating material layer extending in a second direction different from the first direction and exposing the contacting area; and forming a conductive line in the trench to contact the contacting area.
    Type: Grant
    Filed: September 16, 2008
    Date of Patent: February 23, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Miao-Chih Hsu, Tzung-Ting Han, Ming-Shang Chen
  • Publication number: 20090011594
    Abstract: Methods of contact formation and memory arrays formed using such methods, which methods include providing a substrate having a contacting area; forming a plurality of line-shape structures extending in a first direction; forming a hard mask spacer beside the line-shape structure; forming an insulating material layer above the hard mask spacer; forming a contiguous trench in the insulating material layer extending in a second direction different from the first direction and exposing the contacting area; and forming a conductive line in the trench to contact the contacting area.
    Type: Application
    Filed: September 16, 2008
    Publication date: January 8, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Miao-Chih Hsu, Tzung-Ting Han, Ming-Shang Chen
  • Patent number: 7435648
    Abstract: Methods of contact formation and memory arrays formed using such methods, which methods include providing a memory array having a plurality of bit lines disposed below a surface of a semiconductor substrate and a plurality of word lines disposed above the surface of the substrate and transverse to the bit lines; forming a hard mask material layer over the plurality of word lines, wherein an area above at least one of the bit lines and between two consecutive word lines is exposed below an opening in the hard mask material layer; forming an insulating material layer above the hard mask material layer; forming a contiguous trench and via pattern in the insulating material layer above the area such that a portion of the at least one bit line is exposed below the pattern; and forming an interconnection comprising a conductive material disposed in the contiguous trench and via pattern wherein the interconnection is in conductive contact with the exposed portion of the at least one bit line.
    Type: Grant
    Filed: July 26, 2006
    Date of Patent: October 14, 2008
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Miao Chih Hsu, Tzung Ting Han, Ming Shang Chen
  • Publication number: 20080026561
    Abstract: Methods of contact formation and memory arrays formed using such methods, which methods include providing a memory array having a plurality of bit lines disposed below a surface of a semiconductor substrate and a plurality of word lines disposed above the surface of the substrate and transverse to the bit lines; forming a hard mask material layer over the plurality of word lines, wherein an area above at least one of the bit lines and between two consecutive word lines is exposed below an opening in the hard mask material layer; forming an insulating material layer above the hard mask material layer; forming a contiguous trench and via pattern in the insulating material layer above the area such that a portion of the at least one bit line is exposed below the pattern; and forming an interconnection comprising a conductive material disposed in the contiguous trench and via pattern wherein the interconnection is in conductive contact with the exposed portion of the at least one bit line.
    Type: Application
    Filed: July 26, 2006
    Publication date: January 31, 2008
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Miao Chih Hsu, Tzung Ting Han, Ming Shang Chen