Patents by Inventor Miao Xu

Miao Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180018700
    Abstract: A method and device for processing promotion information and a system are provided. The method includes that: agreement information and exposure requirements of all promotion information within a preset period are acquired (101); directional delivered targets are determined according to the agreement information and the exposure requirements, and the directional delivered targets are split into multiple non-intersected delivered target sets (102); the promotion information is delivered to users corresponding to the corresponding delivered target sets according to the exposure requirements (103); statistics about social propagation amounts of to the delivered promotion information is made in real time in a delivery process (104); and exposure parameters are corrected according to the social propagation amounts (105), so that delivery of the promotion information is regulated in real time. By the method, the effectiveness and accuracy of delivering the promotion information may be improved.
    Type: Application
    Filed: July 7, 2017
    Publication date: January 18, 2018
    Inventors: Chuanjiang LUO, Lei XIAO, Dapeng LIU, Lili ZHAO, Peili LV, Xue BAI, Jinjing LIU, Wei XUE, Miao XU, Yang WANG
  • Patent number: 9691624
    Abstract: Provided is a method for manufacturing a fin structure. The method may include forming an initial fin on a substrate, forming a dielectric layer on the substrate to cover the initial fin, planarizing the dielectric layer by sputtering, and further etching the dielectric layer back to expose a portion of the initial fin, wherein the exposed portion serves as a fin.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: June 27, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu, Jun Luo, Chunlong Li, Guilei Wang
  • Patent number: 9679962
    Abstract: There is provided a method of manufacturing a Fin Field Effect Transistor (FinFET). The method may include: forming a fin on a semiconductor substrate; forming a dummy device including a dummy gate on the fin; forming an interlayer dielectric layer to cover regions except for the dummy gate; removing the dummy gate to form an opening; implanting ions to form a Punch-Through-Stop Layer (PTSL) in a portion of the fin directly under the opening, while forming reflection doped layers in portions of the fin on inner sides of source/drain regions; and forming a replacement gate in the opening.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: June 13, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Miao Xu, Huilong Zhu, Lichuan Zhao
  • Patent number: 9633854
    Abstract: The present disclosure discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer comprising a semiconductor substrate, a buried insulating layer, and a semiconductor layer, the buried insulating layer being disposed on the semiconductor substrate, and the semiconductor layer being disposed on the buried insulating layer; a gate stack disposed on the semiconductor layer; a source region and a drain region embedded in the semiconductor layer and disposed on both sides of the gate stack; and a channel region embedded in the semiconductor layer and sandwiched between the source region and the drain region, wherein the MOSFET further comprises a back gate and a counter doped region, and wherein the back gate is embedded in the semiconductor substrate, the counter doped region is disposed under the channel region and embedded in the back gate, and the back gate has a doping type opposite to that of the counter doped region.
    Type: Grant
    Filed: August 2, 2011
    Date of Patent: April 25, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang
  • Publication number: 20160190236
    Abstract: There is provided a method of manufacturing a Fin Field Effect Transistor (FinFET). The method may include: forming a fin on a semiconductor substrate; forming a dummy device including a dummy gate on the fin; forming an interlayer dielectric layer to cover regions except for the dummy gate; removing the dummy gate to form an opening; implanting ions to form a Punch-Though-Stop Layer (PTSL) in a portion of the fin directly under the opening, while forming reflection doped layers in portions of the fin on inner sides of source/drain regions; and forming a replacement gate in the opening.
    Type: Application
    Filed: July 30, 2015
    Publication date: June 30, 2016
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Miao XU, Huilong ZHU, Lichuan ZHAO
  • Patent number: 9349867
    Abstract: Provided are semiconductor devices and methods for manufacturing the same. An example method may include: forming a first semiconductor layer and a second semiconductor layer sequentially on a substrate; patterning the second semiconductor layer and the first semiconductor layer to form a fin; forming an isolation layer on the substrate, wherein the isolation layer exposes a portion of the first semiconductor layer; implanting ions into a portion of the substrate beneath the fin, to form a punch-through stopper; forming a gate stack crossing over the fin on the isolation layer; selectively etching the second semiconductor layer with the gate stack as a mask, to expose the first semiconductor layer; selectively etching the first semiconductor layer, to form a void beneath the second semiconductor layer; and forming a third semiconductor layer on the substrate, to form source/drain regions.
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: May 24, 2016
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang, Haizhou Yin
  • Publication number: 20160133729
    Abstract: A Metal Oxide Thin Film Transistor (MOTFT) and a preparation method thereof are provided. The preparation method includes the following steps in turn: Step a: a metal conductive layer is prepared and patterned as a gate on a substrate; Step b: a first insulating thin film is deposited as a gate insulating layer on the metal conductive layer; Step c: a metal oxide thin film is deposited and patterned as an active layer on the gate insulating layer; Step d: an organic conductive thin film is deposited as a back channel etch protective layer on the active layer; Step e: a metal layer is deposited on the back channel etch protective layer and then patterned as pattern of a source electrode and a drain electrode; Step f: a second insulating thin film is deposited as a passivation layer on the source electrode and the drain electrode.
    Type: Application
    Filed: August 7, 2013
    Publication date: May 12, 2016
    Inventors: Miao XU, Dongxiang LUO, Hongmeng LI, Jiawei PANG, Ying GUO, Lang WANG
  • Patent number: 9252280
    Abstract: The present disclosure discloses a metal-oxide-semiconductor field-effect transistor (MOSFET) and a method for manufacturing the same. The MOSFET includes: a silicon on insulator (SOI) wafer which comprises a semiconductor substrate, a buried insulating layer, and a semiconductor layer, the buried insulating layer being on the semiconductor substrate, and the semiconductor layer being on the buried insulating layer; a gate stack on the semiconductor layer; a source region and a drain region, which are in the semiconductor layer and on opposite sides of the gate stack; and a channel region, which is in the semiconductor layer and sandwiched by the source region and the drain region, wherein the MOSFET further comprises a back gate, the back gate being located in the semiconductor substrate and having a first doped region in a lower portion of the back gate and a second doped region in an upper portion of the back gate.
    Type: Grant
    Filed: November 18, 2011
    Date of Patent: February 2, 2016
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang
  • Publication number: 20150325699
    Abstract: A FinFET and a method for manufacturing the same are provided. The method includes: patterning a semiconductor substrate to form a ridge; performing ion implantation such that a doped punch-through-stopper layer is formed in the ridge and a semiconductor fin is formed by a portion of the semiconductor substrate disposed above the doped punch-through-stopper layer; forming a gate stack intersecting the semiconductor fin, the gate stack comprising a gate conductor and a gate dielectric isolating the gate conductor from the semiconductor fin; forming a gate spacer surrounding the gate conductor; and forming source and drain regions in portions of the semiconductor fin at opposite sides of the gate stack.
    Type: Application
    Filed: December 7, 2012
    Publication date: November 12, 2015
    Inventors: Huilong Zhu, Miao Xu
  • Publication number: 20150294879
    Abstract: Provided is a method for manufacturing a fin structure. The method may include forming an initial fin on a substrate, forming a dielectric layer on the substrate to cover the initial fin, planarizing the dielectric layer by sputtering, and further etching the dielectric layer back to expose a portion of the initial fin, wherein the exposed portion serves as a fin.
    Type: Application
    Filed: December 14, 2012
    Publication date: October 15, 2015
    Inventors: Huilong Zhu, Miao Xu, Jun Luo, Chunlong Li, Guilei Wang
  • Publication number: 20150287828
    Abstract: A semiconductor device and a method of manufacturing the same are provided, wherein an example method may include: forming a first semiconductor layer and a second semiconductor layer sequentially on a substrate; patterning the second semiconductor layer and the first semiconductor layer to form a fin; forming an isolation layer on the substrate, wherein the isolation layer exposes a portion of the first semiconductor layer; forming a sacrificial gate stack crossing over the fin on the isolation layer; selectively etching the second semiconductor layer with the sacrificial gate stack as a mask, to expose the first semiconductor layer; selectively etching the first semiconductor layer, to form a void beneath the second semiconductor layer; filling the void with a dielectric material; forming a third semiconductor layer on the substrate, to form source/drain regions; and forming a gate stack to replace the sacrificial gate stack.
    Type: Application
    Filed: November 26, 2012
    Publication date: October 8, 2015
    Inventors: Huilong Zhu, Miao Xu, Haizhou Yin, Qingqing Liang
  • Publication number: 20150255609
    Abstract: Provided are semiconductor devices and methods for manufacturing the same. An example method may include: forming a first semiconductor layer and a second semiconductor layer sequentially on a substrate; patterning the second semiconductor layer and the first semiconductor layer to form a fin; forming an isolation layer on the substrate, wherein the isolation layer exposes a portion of the first semiconductor layer; implanting ions into a portion of the substrate beneath the fin, to form a punch-through stopper; forming a gate stack crossing over the fin on the isolation layer; selectively etching the second semiconductor layer with the gate stack as a mask, to expose the first semiconductor layer; selectively etching the first semiconductor layer, to form a void beneath the second semiconductor layer; and forming a third semiconductor layer on the substrate, to form source/drain regions.
    Type: Application
    Filed: December 4, 2012
    Publication date: September 10, 2015
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang, Haizhou Yin
  • Publication number: 20150221769
    Abstract: An FinFET and a method for manufacturing the same are disclosed. The FinFET comprises: a semiconductor substrate; a stress layer on the semiconductor substrate; a semiconductor fin on the stress layer, the semiconductor fin having two sidewalls extending in its length direction; a gate dielectric on the sidewalls of the semiconductor fin; a gate conductor on the gate dielectric; and a source region and a drain region at two ends of the semiconductor fin, wherein the stress layer extends below and in parallel with the semiconductor fin, and applies stress to the semiconductor fin in the length direction of the semiconductor fin.
    Type: Application
    Filed: August 24, 2012
    Publication date: August 6, 2015
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu
  • Publication number: 20150216895
    Abstract: The invention provides for methods of treating lysosomal storage disorders and/or reduction of non-cholesterol lipids, using cyclodextrin compounds, including in combination with other therapeutics, including vitamin E.
    Type: Application
    Filed: August 3, 2013
    Publication date: August 6, 2015
    Inventors: John McKew, Wei Zheng, Miao Xu, Manju Swaroop, Juan J. Marugan
  • Publication number: 20150200275
    Abstract: A FinFET with reduced leakage between source and drain regions, and a method for manufacturing the FinFET are disclosed. In one aspect, the method includes forming, on a semiconductor substrate, at least two openings to define a semiconductor fin. The method also includes forming a gate dielectric layer that conformally covers the fin and the openings. The method also includes forming, within the openings, a first gate conductor adjacent to the bottom of the fin. The method also includes forming, within the openings, an insulating isolation layer on the first gate conductor. The method also includes forming a second gate conductor on the fin and on the insulating isolation layer adjacent to the top of the fin. The method also includes forming spacers on sidewalls of the second gate conductor. The method also includes forming a source region and a drain region in the fin.
    Type: Application
    Filed: December 29, 2014
    Publication date: July 16, 2015
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang, Haizhou Yin
  • Patent number: 9012963
    Abstract: The present application discloses a semiconductor device comprising a source region and a drain region in an ultra-thin semiconductor layer; a channel region between the source region and the drain region in the ultra-thin semiconductor layer; a front gate stack above the channel region, the front gate comprising a front gate and a front gate dielectric between the front gate and the channel region; and a back gate stack below the channel region, the back gate stack comprising a back gate and a back gate dielectric between the back gate and the channel region, wherein the front gate is made of a high-Vt material, and the back gate is made of a low-Vt material. According to another embodiment, the front gate and the back gate are made of the same material, and the back gate is applied with a forward bias voltage during operation. The semiconductor device alleviates threshold voltage fluctuation due to varied thickness of the channel region by means of the back gate.
    Type: Grant
    Filed: November 18, 2011
    Date of Patent: April 21, 2015
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Qingqing Liang, Miao Xu, Huilong Zhu, Huicai Zhong
  • Patent number: 8933512
    Abstract: The present application discloses a MOSFET and a method for manufacturing the same.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: January 13, 2015
    Assignee: Institute of Microelectronics, Chinese Academy of Science
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang
  • Publication number: 20140235493
    Abstract: A muitimode gas sensor platform (100) can comprise an array of electrode pairs (108) oriented on a substrate (102) and a plurality of detection zones (104), wherein at least a portion of individual electrode pairs (106) are separately addressable. Each detection zone (104) can comprise at least one set of individual electrode pairs (106) within the array, where the individual electrode pairs (106) have organic nanofibers (108) uniformly deposited thereon. The organic nanofibers (108) can be responsive to association with a corresponding target material and at least one detection zone (104) can be electronically responsive to the corresponding target material.
    Type: Application
    Filed: September 19, 2012
    Publication date: August 21, 2014
    Inventors: Ling Zang, Benjamin Bunes, Miao Xu
  • Patent number: 8716799
    Abstract: The present application discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer, which comprises a semiconductor substrate, a buried insulator layer, and a semiconductor layer, the buried insulator layer being disposed on the semiconductor substrate, and the semiconductor layer being disposed on the buried insulator layer; a gate stack, which is disposed on the semiconductor layer; a source region and a drain region, which are disposed in the semiconductor layer and on opposite sides of the gate stack; and a channel region, which are disposed in the semiconductor layer and sandwiched by the source region and the drain region, wherein the MOSFET further comprises a back gate disposed in the semiconductor substrate, and wherein the back gate comprises first, second and third compensation doping regions, the first compensation doping region is disposed under the source region and the drain region; the second compensation doping region extends in a direction away fro
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: May 6, 2014
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang
  • Publication number: 20130099315
    Abstract: The present disclosure discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer which comprises a semiconductor substrate, a buried insulating layer, and a semiconductor layer, the buried insulating layer being on the semiconductor substrate, and the semiconductor layer being on the buried insulating layer; a gate stack on the semiconductor layer; a source region and a drain region, which are in the semiconductor layer and on opposite sides of the gate stack; and a channel region, which is in the semiconductor layer and sandwiched by the source region and the drain region, wherein the MOSFET further comprises a back gate, the back gate being located in the semiconductor substrate and having a first doped region in a lower portion of the back gate and a second doped region in an upper portion of the back gate. The MOSFET can adjust the threshold voltage by changing the doping type and doping concentration of the anti-doped region.
    Type: Application
    Filed: November 18, 2011
    Publication date: April 25, 2013
    Inventors: Huilong Zhu, Miao Xu, Qingqing Liang