Abstract: A linear substrate delivery and load lock system including a vacuum transfer chamber having a slit valve connected to a processing chamber and a rotatable carousel having two or more seats for supporting substrates in split path between the substrate source and the processing chamber. Two linear transfer mechanisms transfer the substrates between the source and the carousel and between the carousel and the processing chamber. The transfer mechanism may be disposed mostly located below the carousel and have similar structures but with arms having substrate blades on their end extending in opposite directions to move between the carousel and the source and processing chamber respectively. The carousel moves vertically to effect the transfer to and from the blades. A vertically movable cassette may constitute the substrate source.

Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.

Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical, drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.

Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.

Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical, drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.

Abstract: A transfer arm assembly for transferring wafers between a load-lock chamber or a transfer chamber and processing chamber. The wafer is selectively held on the end of a paddle. Linear horizontal motion is provided by a drawer-slide mechanism including a base, a carriage, and the paddle. Slides are mounted on the base and on the carriage. Wheels mounted on the carriage slidably engage the base slides and support the carriage on the base, and wheels mounted on the paddle slidably engage the carriage slides and support the paddle on the carriage. Thereby, the paddle may be projected a distance greater than the lateral extent of the base or of the vacuum chamber accommodating the base and its supported components in their retracted positions. A single motor mounted on the carriage can provide the two relative motions among the base, carriage, and paddle by means of two belt mechanisms wrapped around two capstans attached to the motor shaft.

Abstract: Apparatus for holding and aligning a sample to be examined by a scanning electron microscope or the like includes an alignment device having base structure installable in the scanning electron microscope in a predetermined orientation. The alignment device also includes a holder for the sample which is mounted to the base structure for rotative movement about a rotation axis relative to the base structure. An adjuster is mounted on the base structure and can be manipulated to rotate the sample holder about the rotation axis. This alignment device is installed in a base holder and a video camera captures an image of the sample held by the sample holder. The image is displayed on a video monitor and the adjuster is then manipulated to rotatively align the sample to a desired orientation. The alignment device, including the sample, may then be removed from the base holder and installed in the scanning electron microscope with the sample being properly aligned.