Patents by Inventor Michael A. Beck

Michael A. Beck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for 2D workpiece alignment
    Patent number: 9082799
    Abstract: A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.
    Type: Grant
    Filed: September 20, 2012
    Date of Patent: July 14, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: William T. Weaver, Charles T. Carlson, Scott A. Smith, Michael A. Beck, Aaron P. Webb, James D. Strassner, Lawrence R. Gravell, Michael C. Simmons
  • System and Method for 2D Workpiece Alignment
    Publication number: 20140077431
    Abstract: A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.
    Type: Application
    Filed: September 20, 2012
    Publication date: March 20, 2014
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: William T. Weaver, Charles T. Carlson, Scott A. Smith, Michael A. Beck, Aaron P. Webb, James D. Strassner, Lawrence R. Gravell, Michael C. Simmons