Patents by Inventor Michael A. Booke

Michael A. Booke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High accuracy, high flexibility, energy beam machining system
    Patent number: 5171964
    Abstract: A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.
    Type: Grant
    Filed: August 15, 1991
    Date of Patent: December 15, 1992
    Assignee: International Business Machines Corporation
    Inventors: Michael A. Booke, Michael H. W. Kallmeyer, Nabil A. Rizk, You-Wen Yau
  • High accuracy, high flexibility energy beam machining system
    Patent number: 5145551
    Abstract: A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.
    Type: Grant
    Filed: September 13, 1991
    Date of Patent: September 8, 1992
    Assignee: International Business Machines Corporation
    Inventors: Michael A. Booke, Michael H. W. Kallmeyer, Nabil A. Rizk, You-Wen Yau
  • High accuracy, high flexibility energy beam machining system
    Patent number: 5124522
    Abstract: A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.
    Type: Grant
    Filed: July 23, 1990
    Date of Patent: June 23, 1992
    Inventors: Michael A. Booke, Michael H. W. Kallmeyer, Nabil A. Rizk, You-Wen Yau