Abstract: An adapter assembly (28) for use in an automated handling equipment system includes a first component and a second component that is selectively mountable to the first component. At least one first code member (82) is associated with the first component and at least one second code member (84) is associated with a second component. The at least one first code member and the at least one second code member have a variable orientation relative to each other that controls whether the second component can be mounted to the first component.

Abstract: A gripper assembly includes at least one gripper jaw and an actuator operative for moving the at least one gripper jaw. A support is fixed relative to the actuator for supporting the at least one gripper jaw. A stop member is removably affixable between the at least one gripper jaw and the support for limiting movement of the at least one gripper jaw.

Abstract: A dual spherical ball clamp is employed to allow for pivotal adjustment of a robotic arm to support an object in a desired position. The clamp is formed by a pair of clamp halves bolted together to form a pair of sockets. Each socket receives a spherical ball of an arm. The faces of the dual spherical ball clamp are slightly inclined outwardly with respect to the lower surface of the dual spherical ball clamp to provide for additional range of motion of the arms.

Abstract: Dummy features (64, 65, 48a, 48b) are formed within an interlevel dielectric layer (36). Passivation layers (32 and 54) are formed by electroless deposition to protect the underlying conductive regions (44, 48a, 48b and 30) from being penetrated from the air gaps (74). In addition, the passivation layers (32 and 54) overhang the underlying conductive regions (44, 48a, 48b and 30), thereby defining dummy features (65a, 65b and 67) adjacent the conductive regions (48a, 44 and 48b). The passivation layers (32 and 54) can be formed without additional patterning steps and help minimize misaligned vias from puncturing air gaps.

Abstract: Dummy features (64, 65, 48a, 48b) are formed within an interlevel dielectric layer (36). Passivation layers (32 and 54) are formed by electroless deposition to protect the underlying conductive regions (44, 48a, 48b and 30) from being penetrated from the air gaps (74). In addition, the passivation layers (32 and 54) overhang the underlying conductive regions (44, 48a, 48b and 30), thereby defining dummy features (65a, 65b and 67) adjacent the conductive regions (48a, 44 and 48b). The passivation layers (32 and 54) can be formed without additional patterning steps and help minimize misaligned vias from puncturing air gaps.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: A mounting arrangement includes a multi-functional arm mounted in a mounting receiver. The arm includes a forward enlarged section, an intermediate recessed section, and a rearward enlarged section. The mounting receiver includes a forward mounting portion, an intermediate open portion, and a rearward mounting portion. The arm is mounted by aligning the intermediate recessed section of the arm over a top opening in the forward mounting portion, lowering the arm and sliding it rearwardly. A pair of pins on the arm engage a pair of aligned apertures on the front surface of the forward mounting portion to minimize looseness between the arm and the mounting receiver. A latch mechanism engages the arm to secure the arm in the mounting receiver and provides a visual indication that the arm is properly engaged. When the latch mechanism is pivoted by an operator inwardly, the latch mechanism disengages the arm, allowing removal of the arm from the mounting receiver.

Abstract: A fluid pressure actuated gripper employed in automated workpiece handling systems. The gripper clampingly grips and transfers workpieces from one station to another. A pair of jaw members are positioned in the gripper device which has a pressure-actuated mechanism, a base plate and removable side plate members. A pair of axially offset cam pin members attached to the end of a piston rod and actuated by the pressure-actuated mechanism is used to open and close the gripper jaw members. Pivot pins or shafts pivotably connect the jaw members to the side plate members.

Abstract: A method for forming a semiconductor device is disclosed in which a fluorinated silicon dioxide layer is formed over a semiconductor substrate. A first undoped silicon dioxide layer, with a thickness preferably less than approximately 50 nanometers, is then formed on the fluorinated silicon dioxide layer with a PECVD process wherein a power ratio of a high frequency power source of the PECVD reactor to a low frequency power source is preferably in a range of approximately 0.2:1 to 0.4:1. In one embodiment, a second undoped silicon dioxide layer may be formed prior to forming the fluorinated silicon layer. The second undoped silicon dioxide, the fluorinated silicon dioxide layer, and the first undoped silicon dioxide layer may be formed sequentially in the same plasma enhanced chemical vapor deposition process chamber during a single chamber evacuation cycle. The first undoped silicon dioxide layer is preferably characterized as having a refractive index greater than approximately 1.460.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: A mounting arrangement includes a multi-functional arm mounted in a mounting receiver. The arm includes a forward enlarged section, an intermediate recessed section, and a rearward enlarged section. The mounting receiver includes a forward mounting portion, an intermediate open portion, and a rearward mounting portion. The arm is mounted by aligning the intermediate recessed section of the arm over a top opening in the forward mounting portion, lowering the arm and sliding it rearwardly. A pair of pins on the arm engage a pair of aligned apertures on the front surface of the forward mounting portion to minimize looseness between the arm and the mounting receiver. A latch mechanism engages the arm to secure the arm in the mounting receiver and provides a visual indication that the arm is properly engaged. When the latch mechanism is pivoted by an operator inwardly, the latch mechanism disengages the arm, allowing removal of the arm from the mounting receiver.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: A dual spherical ball clamp is employed to allow for pivotal adjustment of a robotic arm to support an object in a desired position. The clamp is formed by a pair of clamp halves bolted together to form a pair of sockets. Each socket receives a spherical ball of an arm. The edges of the dual spherical ball clamp are slightly inclined outwardly with respect to the lower surface of the dual spherical ball clamp to provide for additional range of motion of the arms.

Abstract: A fluid pressure actuated gripper employed in automated workpiece handling systems. The gripper clampingly grips and transfers workpieces from one station to another. A pair of jaw members are positioned in the gripper device which has a pressure-actuated mechanism, a base plate and removable side plate members. A pair of axially offset cam pin members attached to the end of a piston rod and actuated by the pressure-actuated mechanism is used to open and close the gripper jaw members. Pivot pins or shafts pivotably connect the jaw members to the side plate members.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly release from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly released from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: A tool mounting frame incorporates a unique structure that secures the frame to a base at least at four points. The four-point connection ensures that the tool mounting frame will not move relative to the base. The frame has particular application in moving cross-bars, which are subject to vibration and stress from the weight of the parts they are moving. In a first embodiment, the frame incorporates two spaced locking portions that are interconnected by axially extending rails. The rails allow the mounting of tools at any location along the rail. The connection between the locking portions and the base includes pins at each lateral side of each of the forward and rear positions. In this way, a secure connection is provided. In a second embodiment, the four-point connection is provided by locking pins, and also by a roller fixed to the base which is received between two spring biased fingers.

Abstract: A breakaway connection for securely mounting a tool to a robot is disclosed. The breakaway connection incorporates a plunger that is spring biased from a moving member into a notch in a fixed member. Moment arm forces on the tool are translated to the connection between the plunger and the notch. Should those overload forces exceed the spring force on the plunger, the plunger moves out of the notch. At that time, the tool is free to pivot relative to the housing to a disabled position. This pivoting movement allows the tool to move away from an obstruction that might have caused the force. A universal joint connection is used between the moving member and its housing. The spring force on the plunger may be adjusted. In addition, a sensor may monitor movement of the plunger and communicate with a control for the robot to allow the robot to identify when the plunger begins to move.