Abstract: The invention provides a method and system for determining a pressure compensation factor for use in an ion implanter, which uses one or a small number of test workpieces. The method includes providing a test workpiece in the ion implantation system, wherein the test workpiece has at least one band region, assuming a predicted pressure compensation factor, implanting the at least one band region of the test workpiece with an ion beam using the ion implantation system and the predicted pressure compensation factor while measuring ion beam current and a pressure in the ion implantation system, measuring a sheet resistance associated with the implanted test workpiece, and determining a pressure compensation factor according to the predicted pressure compensation factor, the measured sheet resistance, the measured ion beam current, and the measured pressure.

Abstract: The invention provides a method and system for determining a pressure compensation factor for use in an ion implanter, which uses one or a small number of test workpieces. The method includes providing a test workpiece in the ion implantation system, wherein the test workpiece has at least one band region, assuming a predicted pressure compensation factor, implanting the at least one band region of the test workpiece with an ion beam using the ion implantation system and the predicted pressure compensation factor while measuring ion beam current and a pressure in the ion implantation system, measuring a sheet resistance associated with the implanted test workpiece, and determining a pressure compensation factor according to the predicted pressure compensation factor, the measured sheet resistance, the measured ion beam current, and the measured pressure.

Abstract: An acoustic array, useful for sonar, comprises a plurality of transducing ements which are free floating and not connected to each other. Means are provided for locating the position of each of the transducer elements. The acoustic array may be one-dimensional, that is, a line array, a two-dimensional array, or a three-dimensional array. In another embodiment of the acoustic array, the transducing elements are free-floating but connected to each other by a flexible tether, which limits the range of separation of one transducing element from any of the others. The locator comprises a centrally located element to which there are attached three horizontal rigid arms. On the end of each arm is a high-frequency acoustic transducer. Periodically, each of the transducers transmits a high-frequency broadband pulse. The pulse from each of the three transducers is unique and identifiable.

Abstract: A target discriminating antipersonnel/antimaterial cluster weapon capable distinguishing between hard and soft targets. Upon striking a hard target such as armor or concrete, shear rivets are defeated causing a striker to plunge a firing pin into a stab detonator which through an explosive transfer train causes immediate detonation of the bomblet. Upon hitting a soft target such as sandy soil, the shear rivets will not be sheared, however, an inertia firing weight plunges a firing pin assembly into a stab primer which leads to a propellant charge causing the bomblet to pop back up into the air. The bomblet then is detonated through a pyrotechnic delay in the air. The bomblet is armed during its descent via a flutter plate giving oscillatory motion which is transferred into rotary motion. The rotary motion is employed to align the primer and detonator with the firing pins.