Patents by Inventor Michael A Mastro

Michael A Mastro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12376388
    Abstract: A light controlled semiconductor switch (LCSS), method of making, and method of using are provided. In embodiments, a vertical LCSS includes: a semiconductor body including a photoactive layer of gallium nitride (GaN) doped with carbon; a first electrode in contact with a first surface of the semiconductor body, the first electrode defining an area through which light energy from at least one light source can impinge on the first surface; and a second electrode in contact with a second surface of the semiconductor body opposed to the first surface, wherein the vertical LCSS is configured to switch from a non-conductive off-state to a conductive on-state when the light energy impinging on the semiconductor body is sufficient to raise electrons within the photoactive layer into a conduction band of the photoactive layer.
    Type: Grant
    Filed: September 8, 2023
    Date of Patent: July 29, 2025
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Andrew D. Koehler, Travis J. Anderson, Geoffrey M. Foster, Karl D. Hobart, Francis J. Kub, Michael A. Mastro
  • Patent number: 12243916
    Abstract: Semiconductor heterostructures having an engineered polarization. Semiconductor materials having specified crystallographic directions and specified polarizations are directly bonded to one another by means of atomic layer bonding without the use of any interfacial bonding materials, where spontaneous polarization of the two layers produced by joining the two materials by direct wafer bonding produces a strong 2DEG or 2DHG at the interface. Embodiments include GaN/AlN and AlN/GaN heterostructures having an N- or Ga-polar GaN layer directly bonded to an N- or Al-polar Al layer. Other embodiments can incorporate an InN epitaxial layer or an alloy incorporating an N-polar, Al-polar, or Ga-polar material having In, Al, or Ga in the crystal lattice, e.g., (InxAl1-xN), InxGa1-xN, AlxGa1-xN, InxAlyGa1-x-yN, where (0<x?1, 0<y?1, 0<x+y?1).
    Type: Grant
    Filed: April 28, 2022
    Date of Patent: March 4, 2025
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Karl D. Hobart, Marko J. Tadjer, Michael A. Mastro, Mark Goorsky, Asif Khan, Samuel Graham, Jr.
  • Patent number: 11996840
    Abstract: Light controlled switching modules are provide. In embodiments, a light controlled switching module includes: a housing; a light controlled semiconductor switch mounted to the housing, the light controlled semiconductor switch including a semiconductor body; at least one light source mounted to the housing in a spaced relationship from the light controlled semiconductor switch and positioned to direct light emitted from the at least one light source toward the semiconductor body; and first and second electrodes mounted to the housing and connected to the light controlled semiconductor switch, wherein the first and second electrodes are configured to have variable resistance between the first and the second electrode.
    Type: Grant
    Filed: September 8, 2023
    Date of Patent: May 28, 2024
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Andrew D Koehler, Travis J. Anderson, Geoffrey M. Foster, Karl D. Hobart, Francis J. Kub, Michael A. Mastro
  • Publication number: 20240097064
    Abstract: A light controlled semiconductor switch (LCSS), method of making, and method of using are provided. In embodiments, a vertical LCSS includes: a semiconductor body including a photoactive layer of gallium nitride (GaN) doped with carbon; a first electrode in contact with a first surface of the semiconductor body, the first electrode defining an area through which light energy from at least one light source can impinge on the first surface; and a second electrode in contact with a second surface of the semiconductor body opposed to the first surface, wherein the vertical LCSS is configured to switch from a non-conductive off-state to a conductive on-state when the light energy impinging on the semiconductor body is sufficient to raise electrons within the photoactive layer into a conduction band of the photoactive layer.
    Type: Application
    Filed: September 8, 2023
    Publication date: March 21, 2024
    Inventors: Andrew D. Koehler, Travis J. Anderson, Geoffrey M. Foster, Karl D. Hobart, Francis J. Kub, Michael A. Mastro
  • Publication number: 20230352571
    Abstract: Semiconductor heterostructures having an engineered polarization. Semiconductor materials having specified crystallographic directions and specified polarizations are directly bonded to one another by means of atomic layer bonding without the use of any interfacial bonding materials, where spontaneous polarization of the two layers produced by joining the two materials by direct wafer bonding produces a strong 2DEG or 2DHG at the interface. Embodiments include GaN/AIN and AlN/GaN heterostructures having an N- or Ga-polar GaN layer directly bonded to an N- or Al-polar Al layer. Other embodiments can incorporate an InN epitaxial layer or an alloy incorporating an N-polar, Al-polar, or Ga-polar material having In, Al, or Ga in the crystal lattice, e.g., (InxAl1-xN), InxGa1-xN, AlxGa1-xN, InxAlyGa1-x-yN, where (0<x?1, 0<y?1, 0<x+y?1).
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Karl D. Hobart, Marko J. Tadjer, Michael A. Mastro, Mark Goorsky, Asif Khan, Samuel Graham, JR.
  • Publication number: 20230352541
    Abstract: Semiconductor heterostructures having an engineered polarization. Semiconductor materials having specified crystallographic directions and specified polarizations are directly bonded to one another by means of atomic layer bonding without the use of any interfacial bonding materials, where spontaneous polarization of the two layers produced by joining the two materials by direct wafer bonding produces a strong 2DEG or 2DHG at the interface. Embodiments include GaN/AlN and AlN/GaN heterostructures having an N- or Ga-polar GaN layer directly bonded to an N- or Al-polar Al layer. Other embodiments can incorporate an InN epitaxial layer or an alloy incorporating an N-polar, Al-polar, or Ga-polar material having In, Al, or Ga in the crystal lattice, e.g., (InxAl1-xN), InxGa1-xN, AlxGa1-xN, InxAlyGa1-x-yN, where (0<x?1, 0<y?1, 0<x+y?1).
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Karl D. Hobart, Marko J. Tadjer, Michael A. Mastro, Mark Goorsky, Asif Khan, Samuel Graham, Jr.
  • Publication number: 20230197534
    Abstract: A computer-implemented method for evaluating a semiconductor wafer. In accordance with the present invention, using a properly designed neural network, the computer can take image data regarding the wafer at issue, plus image and electrical data regarding a prior wafer and devices fabricated on the prior wafer, to find relations to and between structural features, both known and previously unidentified, that can degrade the performance of devices fabricated on the wafer and/or can reduce the device yield of the wafer.
    Type: Application
    Filed: November 4, 2022
    Publication date: June 22, 2023
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Michael A. Mastro, James Gallagher, Travis J. Anderson
  • Patent number: 11448824
    Abstract: A hyperbolic metamaterial assembly comprising alternating one or more first layers and one or more second layers forming a hyperbolic metamaterial, the one or more first layers comprising an intrinsic or non-degenerate extrinsic semiconductor and the one or more second layers comprising a two-dimensional electron or hole gas, wherein one of in-plane or out-of-plane permittivity of the hyperbolic metamaterial assembly is negative and the other is positive.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: September 20, 2022
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventor: Michael A. Mastro
  • Patent number: 10494738
    Abstract: A method of growing crystalline materials on two-dimensional inert materials comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material. A crystalline material grown on a two-dimensional inert material made from the process comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: December 3, 2019
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Neeraj Nepal, Virginia Wheeler, Charles R. Eddy, Jr., Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Rachael L. Myers-Ward, Sandra C. Hangarter
  • Publication number: 20190161887
    Abstract: A method of growing crystalline materials on two-dimensional inert materials comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material. A crystalline material grown on a two-dimensional inert material made from the process comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material.
    Type: Application
    Filed: January 28, 2019
    Publication date: May 30, 2019
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Neeraj Nepal, Virginia Wheeler, Charles R. Eddy, JR., Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Rachael L. Myers-Ward, Sandra C. Hangarter
  • Patent number: 10266963
    Abstract: A method of growing crystalline materials on two-dimensional inert materials comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material. A crystalline material grown on a two-dimensional inert material made from the process comprising functionalizing a surface of a two-dimensional inert material, growing a nucleation layer on the functionalized surface, and growing a crystalline material.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: April 23, 2019
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Neeraj Nepal, Virginia D. Wheeler, Charles R. Eddy, Jr., Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Rachael L. Myers-Ward, Sandra C. Hangarter
  • Publication number: 20160274301
    Abstract: A hyperbolic metamaterial assembly comprising alternating one or more first layers and one or more second layers forming a hyperbolic metamaterial, the one or more first layers comprising an intrinsic or non-degenerate extrinsic semiconductor and the one or more second layers comprising a two-dimensional electron or hole gas, wherein one of in-plane or out-of-plane permittivity of the hyperbolic metamaterial assembly is negative and the other is positive.
    Type: Application
    Filed: March 21, 2016
    Publication date: September 22, 2016
    Inventor: Michael A. Mastro
  • Patent number: 9111786
    Abstract: A device with N-Channel and P-Channel III-Nitride field effect transistors comprising a non-inverted P-channel III-Nitride field effect transistor on a first nitrogen-polar nitrogen face III-Nitride material, a non-inverted N-channel III-Nitride field effect transistor, epitaxially grown, a first III-Nitride barrier layer, two-dimensional hole gas, second III-Nitride barrier layer, and a two-dimensional hole gas. A method of making complementary non-inverted P-channel and non-inverted N-channel III-Nitride FET comprising growing epitaxial layers, depositing oxide, defining opening, growing epitaxially a first nitrogen-polar III-Nitride material, buffer, back barrier, channel, spacer, barrier, and cap layer, and carrier enhancement layer, depositing oxide, growing AlN nucleation layer/polarity inversion layer, growing gallium-polar III-Nitride, including epitaxial layers, depositing dielectric, fabricating P-channel III-Nitride FET, and fabricating N-channel III-Nitride FET.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: August 18, 2015
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, Jr., Jennifer K. Hite
  • Patent number: 9105499
    Abstract: A device with complementary non-inverted N-channel and inverted P-channel field effect transistors comprising a layer grown epitaxially on a substrate, a barrier layer, a two-dimensional electron gas in the first III-Nitride epitaxial layer, a second III-Nitride material layer, and a two-dimensional hole gas in the second III-Nitride epitaxial layer. A device with complementary inverted N-channel and non-inverted P-channel field effect transistors comprising a nitrogen-polar III-Nitride layer grown epitaxially, a barrier material layer, a two-dimensional hole gas, and a two-dimensional electron gas in the second III-Nitride epitaxial layer. A method of making complementary inverted P-channel and non-inverted N-channel III-Nitride field effect transistors. A method of making a complementary non-inverted P-channel field effect transistor and inverted N-channel III-Nitride field effect transistor on a substrate.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: August 11, 2015
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, Jr., Jennifer K. Hite
  • Publication number: 20150221647
    Abstract: A device with N-Channel and P-Channel III-Nitride field effect transistors comprising a non-inverted P-channel III-Nitride field effect transistor on a first nitrogen-polar nitrogen face III-Nitride material, a non-inverted N-channel III-Nitride field effect transistor, epitaxially grown, a first III-Nitride barrier layer, two-dimensional hole gas, second III-Nitride barrier layer, and a two-dimensional hole gas. A method of making complementary non-inverted P-channel and non-inverted N-channel III-Nitride FET comprising growing epitaxial layers, depositing oxide, defining opening, growing epitaxially a first nitrogen-polar III-Nitride material, buffer, back barrier, channel, spacer, barrier, and cap layer, and carrier enhancement layer, depositing oxide, growing AlN nucleation layer/polarity inversion layer, growing gallium-polar III-Nitride, including epitaxial layers, depositing dielectric, fabricating P-channel III-Nitride FET, and fabricating N-channel III-Nitride FET.
    Type: Application
    Filed: December 19, 2014
    Publication date: August 6, 2015
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, JR., Jennifer K. Hite
  • Publication number: 20150221649
    Abstract: A device with complementary non-inverted N-channel and inverted P-channel field effect transistors comprising a layer grown epitaxially on a substrate, a barrier layer, a two-dimensional electron gas in the first III-Nitride epitaxial layer, a second III-Nitride material layer, and a two-dimensional hole gas in the second III-Nitride epitaxial layer. A device with complementary inverted N-channel and non-inverted P-channel field effect transistors comprising a nitrogen-polar III-Nitride layer grown epitaxially, a barrier material layer, a two-dimensional hole gas, and a two-dimensional electron gas in the second III-Nitride epitaxial layer. A method of making complementary inverted P-channel and non-inverted N-channel III-Nitride field effect transistors. A method of making a complementary non-inverted P-channel field effect transistor and inverted N-channel III-Nitride field effect transistor on a substrate.
    Type: Application
    Filed: March 24, 2015
    Publication date: August 6, 2015
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, JR., Jennifer K. Hite
  • Patent number: 9018056
    Abstract: A device with N-Channel and P-Channel III-Nitride field effect transistors comprising a non-inverted P-channel III-Nitride field effect transistor on a first nitrogen-polar nitrogen face III-Nitride material, a non-inverted N-channel III-Nitride field effect transistor, epitaxially grown, a first III-Nitride barrier layer, two-dimensional hole gas, second III-Nitride barrier layer, and a two-dimensional hole gas. A method of making complementary non-inverted P-channel and non-inverted N-channel III-Nitride FET comprising growing epitaxial layers, depositing oxide, defining opening, growing epitaxially a first nitrogen-polar III-Nitride material, buffer, back barrier, channel, spacer, barrier, and cap layer, and carrier enhancement layer, depositing oxide, growing AlN nucleation layer/polarity inversion layer, growing gallium-polar III-Nitride, including epitaxial layers, depositing dielectric, fabricating P-channel III-Nitride FET, and fabricating N-channel III-Nitride FET.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: April 28, 2015
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, Jr., Jennifer K. Hite
  • Patent number: 8900939
    Abstract: High electron mobility transistors and fabrication processes are presented in which a barrier material layer of uniform thickness is provided for threshold voltage control under an enhanced channel charge inducing material layer (ECCIML) in source and drain regions with the ECCIML layer removed in the gate region.
    Type: Grant
    Filed: January 28, 2014
    Date of Patent: December 2, 2014
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis Anderson, Karl D. Hobart, Michael A. Mastro, Charles R. Eddy, Jr.
  • Publication number: 20140264380
    Abstract: A device with N-Channel and P-Channel III-Nitride field effect transistors comprising a non-inverted P-channel III-Nitride field effect transistor on a first nitrogen-polar nitrogen face III-Nitride material, a non-inverted N-channel III-Nitride field effect transistor, epitaxially grown, a first III-Nitride barrier layer, two-dimensional hole gas, second III-Nitride barrier layer, and a two-dimensional hole gas. A method of making complementary non-inverted P-channel and non-inverted N-channel III-Nitride FET comprising growing epitaxial layers, depositing oxide, defining opening, growing epitaxially a first nitrogen-polar III-Nitride material, buffer, back barrier, channel, spacer, barrier, and cap layer, and carrier enhancement layer, depositing oxide, growing AlN nucleation layer/polarity inversion layer, growing gallium-polar III-Nitride, including epitaxial layers, depositing dielectric, fabricating P-channel III-Nitride FET, and fabricating N-channel III-Nitride FET.
    Type: Application
    Filed: January 31, 2014
    Publication date: September 18, 2014
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Michael A. Mastro, Charles R. Eddy, JR., Jennifer K. Hite
  • Publication number: 20140264261
    Abstract: A light emitting device having an electrically conductive metal foam or porous metal substrate, one or more light emitting nanowires in contact with the substrate, and a metal or conductive oxide contact layer in contact with each nanowire junction opposite of the substrate. More specifically, a light emitting device having an electrically conductive metal foam substrate, one or more light emitting nanowires in contact with the substrate, a quantum well on the nanowire(s), a p-type shell on the quantum well, a metal or conductive oxide contact layer in contact with the shell, and an energy down-converting material. Also disclosed is the related method of making a light emitting device.
    Type: Application
    Filed: March 7, 2014
    Publication date: September 18, 2014
    Inventors: Michael A. Mastro, Francis J. Kub