Patents by Inventor Michael A. Matusewic

Michael A. Matusewic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon-on-insulator wafer having conductive layer for detection with electrical sensors
    Patent number: 6238935
    Abstract: A method for fabricating a silicon-on-sapphire wafer for processing by silicon-wafer-processing equipment. A layer is deposited on a backside of a silicon-on-sapphire wafer, the layer having optical and electrical properties of silicon, wherein the silicon-on-sapphire wafer may be sensed by a sensor designed to sense a presence of a silicon wafer.
    Type: Grant
    Filed: March 1, 1999
    Date of Patent: May 29, 2001
    Assignee: International Business Machines Corporation
    Inventors: James L. Egley, George M. Gut, Daniel J. Koch, Michael A. Matusewic
  • Method for fabricating a silicon-on-sapphire wafer
    Patent number: 5877094
    Abstract: A method for fabricating a silicon-on-sapphire wafer for processing by silicon-wafer-processing equipment. A layer is deposited on a backside of a silicon-on-sapphire wafer, the layer having optical and electrical properties of silicon, wherein the silicon-on-sapphire wafer may be sensed by a sensor designed to sense a presence of a silicon wafer.
    Type: Grant
    Filed: April 7, 1994
    Date of Patent: March 2, 1999
    Assignee: International Business Machines Corporation
    Inventors: James L. Egley, George M. Gut, Daniel J. Koch, Michael A. Matusewic