Patents by Inventor Michael A. Neads

Michael A. Neads has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for vertical transfer of a semiconductor wafer cassette
    Patent number: 5931631
    Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.
    Type: Grant
    Filed: May 22, 1998
    Date of Patent: August 3, 1999
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Michael A. Neads, Joshua T. Oen
  • Method and apparatus for vertical transfer of a semiconductor wafer cassette
    Patent number: 5788458
    Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.
    Type: Grant
    Filed: July 10, 1995
    Date of Patent: August 4, 1998
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Michael A. Neads, Joshua T. Oen