Abstract: This invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium flouride crystal. The method includes providing a below 200 nm wavelength transmitting optical flouride crystal having a crystal light transmission path length, providing a 200-210 nm spectrophotometer having a light source for producing a transmission test wavelength in the range 200 to 210 nm and a transmission detector for measuring transmission of the test wavelength, and transmitting the transmission test wavelength in the range of 200 to 210 nm through the below 200 nm wavelength transmitting optical flouride light transmission path length and measuring the transmission of the 200 to 210 nm test wavelength through the path length to provide a lead ppb impurity level measurement less than 500 ppb. The invention provides for improved manufacturing of below 200 nm wavelength optical elements and optical fluoride crystals such as ultralow lead contaminated calcium flouride.

Abstract: A method for making a below 200-nm wavelength optical fluoride crystal feedstock includes loading a fluoride raw material into a chamber, exposing the fluoride raw material to a flow of gaseous fluoride at a predetermined temperature, and storing the exposed fluoride raw material in a dry atmosphere.

Abstract: The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride , which comprises:

Abstract: The invention provides for the making of <200 nm wavelength fluoride crystal optical elements from selected fluoride single crystals of determined quality.

Abstract: The invention provides a method of making ≧4 kHz repetition rate argon fluoride excimer laser crystal optics. The method includes providing a magnesium fluoride crystal solid precursor, nonmetallically crushing the magnesium fluoride solid precursor to provide a crushed low metal contaminant magnesium fluoride feedstock, providing a magnesium fluoride crystal growth crucible, loading the crushed magnesium fluoride feedstock into the crystal growth crucible, melting the loaded crushed magnesium fluoride feedstock to provide a precrystalline magnesium fluoride melt, growing an oriented magnesium fluoride crystal from the precrystalline magnesium fluoride melt, cooling the grown magnesium fluoride crystal to provide a magnesium fluoride laser optical crystal and forming the magnesium fluoride laser crystal into an excimer laser crystal optic for transmitting a high repetition rate (≧4 kHz repetition rate) excimer laser output.

Abstract: The invention provides a ≧4 kHz repetition rate argon fluoride excimer laser system for producing an UV wavelength 193 nm output. The ≧4 kHz repetition rate argon fluoride excimer laser system includes an argon fluoride excimer laser chamber for producing a 193 nm discharge at a pulse repetition rate ≧4 kHz. The ≧4 kHz repetition rate argon fluoride excimer laser chamber includes magnesium fluoride crystal optic windows for outputting the 193 nm discharge as a ≧4 kHz repetition rate excimer laser 193 nm output with the magnesium fluoride crystal optic windows having a 255 nm induced absorption less than 0.08 Abs/42 mm when exposed to 5 million pulses of 193 nm light a fluence ≧40 mj/cm2/pulse and a 42 mm crystal 120 nm transmission of at least 30%.

Abstract: The present invention has the following objectives:

Abstract: A process for producing high quality TPA suitable for PET feedstock material from recycled polyester. The process includes the steps of depolymerizing the polyester to form DMT; separating the DMT from secondary materials; and hydrolyzing the DMT to form TPA. In a preferred embodiment of the invention the recycled polyester is contacted with a component monomer or oligomer thereof to liquefy the polyester prior to depolymerizing the polyester.

Abstract: The invention provides a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.

Abstract: A polycrystalline alkali-metal or alkaline-earth metal (more particularly CaF2) fluorides, produced in an original form, namely in the form of beads; said beads having a diameter or equivalent diameter greater than or equal to 100 um, advantageously between 100 um and 2 cm and an apparent density greater than or equal to 60%, advantageously at least 90% of the theoretical density of said fluoride. A process for the preparation of single crystals of the corresponding alkali-metal or alkaline-earth metal fluorides that uses polycrystalline fluorides in the aforementioned original form.

Abstract: Disclosed herein is a process for depolymerizing and purifying contaminated post-consumer polyester. In the process, depolymerization is effected by way of glycolysis in an agitated reactor vessel. The process includes the steps of contacting a contaminated polyester with an amount of a glycol to provide a molar ratio of greater than about 1 to about 5 total glycol units to total dicarboxylic acid units at a temperature between about 150 to about 300° C. and an absolute pressure of about 0.5 to about 3 bars. This reaction is conducted for a time sufficient to produce, in the reactor, an upper layer having a relatively low density contaminant floating on top of a lower layer which includes a relatively high density depolymerized oligomer of the polyester, and separating the upper layer from the lower layer. The layers may be separated by removing the upper layer from the reactor in a first stream and removing said lower layer from the reactor in a second stream.

Abstract: The invention provides a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.

Abstract: The invention provides a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.

Abstract: Disclosed is a process for the production and purification of dialkyl naphthalenedicarboxylate compounds wherein a crude naphthalenediacarboxylic acid is esterified with an alkanol such as methanol to produce a crude esterification product comprising dialkyl naphthalenedicarboxylate, starting materials and other compounds and the crude esterification product is purified by flash distillation to remove impurities which can cause fouling of conventional distillation equipment. A particularly useful diester is dimethyl 2,6-naphthalenedicarboxylate.

Abstract: An apparatus for depolymerizing recycled polyester into its component ester monomers and half esters includes a first reactor for depolymerizing the recycled polyester, a separator for separating ester monomeric components and half-esters from secondary materials produced in the first reactor, and a second reactor for producing a low molecular weight polyester from liquefied separator products.

Abstract: A process for recovering suitable polyester feedstock material from recycled polyester includes the steps of depolymerizing the polyester into its component ester monomers and half-esters; separating the monomers and half-esters from other secondary materials; and mixing the component ester monomers and half-esters with additional monomers to produce a low molecular weight polyester. In a preferred embodiment of the invention the recycled polyester is contacted with a component monomer or oligomer thereof to liquefy the polyester before the polyester is depolymerized.The invention further provides an apparatus for carrying out the process. The apparatus includes a first reactor for depolymerizing the recycled polyester, a separator for separating ester monomeric components and half-esters from secondary materials produced in the first reactor, and a second reactor for producing a low molecular weight polyester from the liquefied separator products.