Patents by Inventor Michael A. Ravkin

Michael A. Ravkin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for improved conditioning of polishing pads
    Patent number: 6123607
    Abstract: A method and apparatus for conditioning the surface of a polishing pad used to polish a substrate, such as a semiconductor wafer. A conditioning apparatus uses two or more end effectors to abrade and/or remove the polishing byproducts from the surface of the pad. Different types of conditioning performance can be achieved when the end effectors are employed individually, sequentially, or simultaneously during a polishing process.
    Type: Grant
    Filed: May 17, 1999
    Date of Patent: September 26, 2000
    Inventors: Michael A. Ravkin, Ilya A. Ravkin, Yuli Verhovsky
  • Method and apparatus for improved conditioning of polishing pads
    Patent number: 5941762
    Abstract: A method and apparatus for conditioning the surface of a polishing pad used to polish a substrate, such as a semiconductor wafer. A conditioning apparatus uses two or more end effectors to abrade and/or remove the polishing byproducts from the surface of the pad. Different types of conditioning performance can be achieved when the end effectors are employed individually, sequentially or simultaneously during a polishing process.
    Type: Grant
    Filed: January 7, 1998
    Date of Patent: August 24, 1999
    Inventors: Michael A. Ravkin, Ilya A. Ravkin, Yuli Verhovsky