Patents by Inventor Michael A. Schrameyer
Michael A. Schrameyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230184636Abstract: A method for preparing an aliquot of solution comprising a plurality of particles is disclosed. The method includes agitating the solution with a baffle at a predetermined mixing speed to suspend the plurality of particles in the solution, wherein the baffle positioned at least partially within a vessel containing the solution, and wherein the vessel is engaged with a vessel receptacle configured to hold the vessel. The method also includes withdrawing, during the agitating, the aliquot of solution from the vessel with a pipette, such that an end of a pipette tip is positioned within the vessel.Type: ApplicationFiled: December 9, 2022Publication date: June 15, 2023Inventors: Arvind Dev, Julie Rollins, Richard Holt, Michael A. Schrameyer, Richard Lemieux, Nicholas Gustafson, Andrey Asanov
-
Patent number: 10826218Abstract: A thermally insulating electrical contact probe including a mounting plate having a tubular pin guide defining a pin pass-through, a cover coupled to the mounting plate and having a neck portion enclosing the pin guide, and an insulating pin having a shank portion disposed within the pin pass-through and defining a conductor pass-through, a flange portion extending radially outwardly from the shank portion above a top of the pin guide, and a pocket portion extending from the flange portion and defining a pocket. The electrical contact probe may further include a spring disposed intermediate the flange portion and the mounting plate, the spring biasing the flange portion away from the mounting plate, an electrical contact pad disposed within the pocket, and an electrical conductor coupled to the electrical contact pad and extending through the conductor pass-through.Type: GrantFiled: January 5, 2018Date of Patent: November 3, 2020Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Michael A. Schrameyer, Steven M. Anella
-
Patent number: 10109510Abstract: An apparatus and method for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a ring heater assembly disposed along the outer circumference of the platen. The ring heater assembly includes heating elements disposed therein or thereon, where these heating elements create heat, which serves to warm the outer edge of the workpiece. In some embodiments, the ring heater assembly extends beyond the edge of the workpiece and may be exposed to the ion beam.Type: GrantFiled: December 18, 2014Date of Patent: October 23, 2018Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Steven M. Anella, Michael A. Schrameyer
-
Publication number: 20180131115Abstract: A thermally insulating electrical contact probe including a mounting plate having a tubular pin guide defining a pin pass-through, a cover coupled to the mounting plate and having a neck portion enclosing the pin guide, and an insulating pin having a shank portion disposed within the pin pass-through and defining a conductor pass-through, a flange portion extending radially outwardly from the shank portion above a top of the pin guide, and a pocket portion extending from the flange portion and defining a pocket. The electrical contact probe may further include a spring disposed intermediate the flange portion and the mounting plate, the spring biasing the flange portion away from the mounting plate, an electrical contact pad disposed within the pocket, and an electrical conductor coupled to the electrical contact pad and extending through the conductor pass-through.Type: ApplicationFiled: January 5, 2018Publication date: May 10, 2018Applicant: Varian Semiconductor Equipment Associates, Inc.Inventor: Michael A. Schrameyer
-
Patent number: 9887478Abstract: A thermally insulating electrical contact probe including a mounting plate having a tubular pin guide defining a pin pass-through, a cover coupled to the mounting plate and having a neck portion enclosing the pin guide, and an insulating pin having a shank portion disposed within the pin pass-through and defining a conductor pass-through, a flange portion extending radially outwardly from the shank portion above a top of the pin guide, and a pocket portion extending from the flange portion and defining a pocket. The electrical contact probe may further include a spring disposed intermediate the flange portion and the mounting plate, the spring biasing the flange portion away from the mounting plate, an electrical contact pad disposed within the pocket, and an electrical conductor coupled to the electrical contact pad and extending through the conductor pass-through.Type: GrantFiled: April 21, 2015Date of Patent: February 6, 2018Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventor: Michael A. Schrameyer
-
Publication number: 20160315407Abstract: A thermally insulating electrical contact probe including a mounting plate having a tubular pin guide defining a pin pass-through, a cover coupled to the mounting plate and having a neck portion enclosing the pin guide, and an insulating pin having a shank portion disposed within the pin pass-through and defining a conductor pass-through, a flange portion extending radially outwardly from the shank portion above a top of the pin guide, and a pocket portion extending from the flange portion and defining a pocket. The electrical contact probe may further include a spring disposed intermediate the flange portion and the mounting plate, the spring biasing the flange portion away from the mounting plate, an electrical contact pad disposed within the pocket, and an electrical conductor coupled to the electrical contact pad and extending through the conductor pass-through.Type: ApplicationFiled: April 21, 2015Publication date: October 27, 2016Inventor: Michael A. Schrameyer
-
Publication number: 20160181132Abstract: An apparatus and method for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a ring heater assembly disposed along the outer circumference of the platen. The ring heater assembly includes heating elements disposed therein or thereon, where these heating elements create heat, which serves to warm the outer edge of the workpiece. In some embodiments, the ring heater assembly extends beyond the edge of the workpiece and may be exposed to the ion beam.Type: ApplicationFiled: December 18, 2014Publication date: June 23, 2016Inventors: Steven M. Anella, Michael A. Schrameyer
-
Patent number: 9175710Abstract: A ceramic fastener includes a ceramic body portion, and a containment layer disposed around the ceramic body portion. The containment layer retains pieces of the ceramic body portion when the ceramic body portion is subjected to a torque sufficient to fracture the ceramic body portion. The fastener can be a nut, and the containment layer can be disposed around one or more of the top, bottom and side surfaces of the nut. The containment layer can be a metal shroud having a thickness from 0.01 to 0.125 inches. The ceramic body portion can be alumina or zirconia. A thread insert may be disposed within a fastener bore of the ceramic body portion.Type: GrantFiled: December 19, 2013Date of Patent: November 3, 2015Assignee: Varian Semiconductor Equipment Associates, IncInventors: Michael A. Schrameyer, Jeffrey E. Krampert
-
Publication number: 20150176625Abstract: A ceramic fastener includes a ceramic body portion, and a containment layer disposed around the ceramic body portion. The containment layer retains pieces of the ceramic body portion when the ceramic body portion is subjected to a torque sufficient to fracture the ceramic body portion. The fastener can be a nut, and the containment layer can be disposed around one or more of the top, bottom and side surfaces of the nut. The containment layer can be a metal shroud having a thickness from 0.01 to 0.125 inches. The ceramic body portion can be alumina or zirconia. A thread insert may be disposed within a fastener bore of the ceramic body portion.Type: ApplicationFiled: December 19, 2013Publication date: June 25, 2015Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Michael A. Schrameyer, Jeffrey E. Krampert
-
Publication number: 20140318455Abstract: An electrostatic chuck includes a heater and an electrode disposed on the heater. The electrostatic chuck also includes an insulator layer and coating disposed on the insulator, where the coating is configured to support an electrostatic field generated by the electrode system to attract a substrate thereto.Type: ApplicationFiled: April 26, 2013Publication date: October 30, 2014Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Julian G. Blake, Dale K. Stone, Lyudmila Stone, Michael Schrameyer
-
Patent number: 8864202Abstract: An end effector is disclosed for use in substrate processing. The end effector includes a effector body portion, a contact pad pocket formed in the end effector body, a spring retaining pocket formed in the end effector body adjacent the contact pad pocket and extending to an edge of the end effector body, and a pair of through-holes extending from the spring retaining pocket to the contact pad pocket. The end effector can include a contact pad seated within the contact pad pocket, the contact pad having at least one retaining channel formed therein, and a retaining spring having a pair of retaining arms extending from the retaining spring pocket through the through-holes and into the contact pad pocket. The retaining arms may extend at least partially into the at least one retaining channel of the contact pad and may thereby restrict movement of the contact pad.Type: GrantFiled: April 12, 2013Date of Patent: October 21, 2014Assignee: Varian Semiconductor Equipment Associates, Inc.Inventor: Michael A. Schrameyer