Abstract: A method and apparatus for regulating the temperature of substrates positioned within a chamber are provided. In one embodiment, a substrate support pin is provided that includes a body having a substrate support region defined at a first end and a mounting region defined at a second end of the body. A mounting feature is formed at the mounting region and is adapted to couple the body to a vacuum chamber body. A passage extends from the mounting region to the support region. An outlet formed through the body and orientated at an angle greater than zero relative to a centerline of the body is p provided to deliver fluids flowing through the passage out the first end of the body. In another embodiment, a chamber includes a pin configured to provide a temperature controlled fluid to an underside of a substrate supported on the pin.

Abstract: A system and method are provided for managing diagnostic and performance information for communications system terminal endpoints (TEs) communicating over an Internet Protocol (IP) network. The TEs communicate by transmissions that are voice, modem, facsimile, video, data transmissions, or the like. A Diagnostic Supervisor (DS) transmits Diagnostic Configuration Messages (DCMs) to the TEs. The TEs generate Diagnostic Messages (DMs) based on diagnostic information, including error statistics, voice statistics, facsimile statistics, video statistics, data statistics, or the like, concerning IP network transmissions in which the TEs participate. The DCMs instructs the TEs how to format and when to transmit DMs. The DMs are transmitted by the TEs to the DS. In a system with more than one DS, the TEs can transmit DMS to the plural DSs, other TEs or any network devices.

Abstract: An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

Abstract: A method for analyzing a system for safety to personnel or other systems is disclosed comprising: identifying at least one operating parameter of a first subcomponent of said product; identifying an inherent hazard of said first subcomponents based on an analysis of the at least one operating parameter; identifying features of the structure or operation of the subcomponent corresponding to the inherent hazard; identifying modifications or controls for the identified features which would mitigate the inherent hazard; prioritizing the identified features with respect to the effect that each of said features has on safety of the product; and determining whether an unsafe condition could result from the inherent hazard.

Abstract: A method for analyzing a system for safety to personnel or other systems is disclosed comprising: identifying at least one operating parameter of a first subcomponent of said product; identifying an inherent hazard of said first subcomponents based on an analysis of the at least one operating parameter; identifying features of the structure or operation of the subcomponent corresponding to the inherent hazard; identifying modifications or controls for the identified features which would mitigate the inherent hazard; prioritizing the identified features with respect to the effect that each of said features has on safety of the product; and determining whether an unsafe condition could result from the inherent hazard.

Abstract: A method for analyzing a system for safety to personnel or other systems is disclosed comprising: identifying at least one operating parameter of a first subcomponent of said product; identifying an inherent hazard of said first subcomponents based on an analysis of the at least one operating parameter; identifying features of the structure or operation of the subcomponent corresponding to the inherent hazard; identifying modifications or controls for the identified features which would mitigate the inherent hazard; prioritizing the identified features with respect to the effect that each of said features has on safety of the product; and determining whether an unsafe condition could result from the inherent hazard.

Abstract: A system, method and computer program product for managing diagnostic and performance information for communications system terminal endpoints (TEs) communicating over an Internet Protocol (IP) network. The TEs communicate by connections that are voice, modem, facsimile, video, data transmissions, or the like. A Diagnostic Supervisor (DS) transmits Diagnostic Configuration Messages (DCMs) to the TEs. The TE's generate Diagnostic Messages (DMs) based on diagnostic information, including error statistics, voice statistics, facsimile statistics, video statistics, data statistics, or the like, concerning IP network connections in which the TEs participate. The DCMs instructs the TEs how to format and when to transmit DMs. The DMs are transmitted by the TEs to the DS. In a system with more that one DS, the TEs can transmit DMs to the plural DSs, other TEs or any network devices. The DS can be programmed locally or remotely to send various types of DCMs.

Abstract: A beam sharpened, low sidelobe antenna is obtained by segmenting the antenna to provide two sub-antennas, one of which is arranged as an interferometer. The output signals of the two antennas are added and subtracted to provide sum and difference signals. The sum and difference signals and the output signals are then utilized to provide the desired beam sharpened, low sidelobe antenna.