Patents by Inventor Michael Adrianus Hompus

Michael Adrianus Hompus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for treating a substrate
    Publication number: 20060231031
    Abstract: A method for treating a surface of at least one substrate, wherein the at least one substrate is placed in a process chamber, wherein the pressure in the process chamber is relatively low, wherein a plasma is generated by at least one plasma source, wherein, during the treatment, at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is moved relative to the substrate surface. The invention further provides an apparatus for treating a surface of at least one substrate, wherein the apparatus is provided with a process chamber and at least one plasma source, wherein the at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is movably arranged.
    Type: Application
    Filed: December 12, 2003
    Publication date: October 19, 2006
    Applicant: OTB Group B.V.
    Inventors: Franciscus Dings, Marinus Franciscus Evers, Michael Adrianus Hompus, Martin Bijker