Abstract: A method for sterilizing contact lenses included in a moist environment in a closed package, wherein the package is heated, wherein the heating is carried out by introducing the package into a space which is at superatmospheric pressure or which is adjusted to superatmospheric pressure and which is heated with dry hot air. Further, the invention relates to an apparatus for carrying out such a method.

Abstract: A method for treating a surface of at least one substrate, wherein the at least one substrate is placed in a process chamber, wherein the pressure in the process chamber is relatively low, wherein a plasma is generated by at least one plasma source, wherein, during the treatment, at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is moved relative to the substrate surface. The invention further provides an apparatus for treating a surface of at least one substrate, wherein the apparatus is provided with a process chamber and at least one plasma source, wherein the at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is movably arranged.

Abstract: Apparatus for performing at least one processing operation on a substrate, the apparatus being provided with at least one process chamber and a vacuum lock for the purposes of placing the substrate from the surroundings into a process chamber without the reduced pressure in the respective process chamber being lost, the vacuum lock comprising a vacuum chamber which is bounded by a number of walls and to which a vacuum pump is connected, while in one of the walls at least one supply opening is provided, and for the purpose of the or each process chamber in one of the walls a process chamber opening belonging to a respective process chamber is provided, the at least one supply opening being externally closable with an outer cover and being closable from the vacuum chamber with an inner cover. Further disclosed is an assembly of such an apparatus with a transport device for supplying substrates to a supply opening of the vacuum lock and removing same.

Abstract: A method for the passivation of a semiconductor substrate, wherein a SiNx:H layer is deposited on the surface of the substrate (1) by means of a PECVD process comprising the following steps: the substrate (1) is placed in a processing chamber (5) which has specific internal processing chamber dimensions; the pressure in the processing chamber is maintained at a relatively low value; the substrate (1) is maintained at a specific treatment temperature; a plasma (P) is generated by at least one plasma cascade source (3) mounted on the processing chamber (5) at a specific distance (L) from the substrate surface; at least a part of the plasma (P) generated by each source (3) is brought into contact with the substrate surface; and flows of silane and ammonia are supplied to said part of the plasma (P).

Abstract: A method for the injection moulding of a plastic article, such as CD or a DVD, comprises the following steps: the provision of a mould (1) having at least two mould parts (2, 3), the provision of positioning elements (9, 22) for positioning the mould parts (2, 3) with respect to one another in a nominal mutual spacing such that a mould cavity (6) is obtained, injecting a fluid material into the mould cavity (6) under pressure, influencing the positioning elements (9, 22) in such a way that the nominal distance between the mould parts (2, 3) is maintained when injecting the material (26) into the mould cavity (6) under pressure.

Abstract: A method for the passivation of a semiconductor substrate, wherein a SiNx:H layer is deposited on the surface of the substrate (1) by means of a PECVD process comprising the following steps:

Abstract: Lock for a vacuum chamber which lock has a passage comprising an outer sealing element and an inner sealing element which outer sealing element can be maintained in the closed position under the influence of the pressure difference caused by the vacuum in the vacuum chamber, and can be opened against the force caused by the pressure difference, which inner sealing element under pretension can be maintained in the opened position and comprises closing element for closing the inner sealing element against the pretension, the closing element comprise at least one electromagnet.

Abstract: A method for the injection moulding of a plastic article, such as a CD or DVD comprises the following steps: the provision of a mould (1) having at least two mould parts (2, 3), the provision of positioning means (9, 22) for positioning the mould parts (2, 3) with respect to one another a nominal distance apart such that a mould cavity (6) is obtained, injecting a fluid material (26) into the mould cavity under pressure, influencing the positioning means (9, 22) in such a way that the nominal mutual spacing of the mould parts is maintained when injecting the material (26) into the mould cavity (6) under pressure.