Abstract: A material measure in the form of an amplitude grating including a first reflecting layer, a second transparent layer and a third layer, which is partially transparent to light, the third layer comprising a measuring graduation, wherein the second layer is arranged between the first layer and the third layer.

Abstract: A method for producing a self-supporting electron-optical transparent structure that includes multi-layer strips and recesses located between the multi-layer strips. The method includes applying a first layer to a second layer, presetting a pattern by exposing or irradiating the first layer and etching the pattern out of the first layer so that partial areas of the second layer are uncovered. The method further includes galvanically applying layers to the uncovered partial areas of the second layer so that multi-layer strips are formed thereon and an electron-optical transparent structure is formed and removing the electron-optical transparent structure off the second layer.

Abstract: In a position measuring device, a scale is embodied as a phase grating on which several partial beams impinge and are diffracted and caused to interfere with each other in the scanning unit. The entry angle (&agr;) of the partial beams corresponds to the Littrow angle, so that the diffracted partial beams of ±1st diffraction order are diffracted at the same angle &bgr;=&agr;. The diffraction efficiency of the scale is particularly great if the flanks of the bars of the scales are at an angle of approximately 70° with respect to the measuring direction, i.e., if the bars and gaps are embodied to be trapezoidal in cross section.

Abstract: An optical position measuring device, in particular for a drive for precise positioning, is recited, which comprises two drive units which are movable in respect to each other, wherein one of the two drive units has a graduation as an integral component. The latter can be scanned by a scanning unit connected with the other drive unit for generating position-dependent output signals. The graduation is directly or indirectly disposed on a level surface of the drive unit, from which a distance between the two drive units is created in such a way that by the cooperation of the two drive units the generation of a defined relative movement between the two drive units is possible.

Abstract: The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.

Abstract: An interferential apparatus and method for measuring displacement in which phase displaced signals may be generated by the proper selection of a light source and the division periods of a plurality of gratings.

Abstract: A measurement device having a correction grating associated with a gauge and deflects two diffracted partial beams overlappingly, at a very small angle (.alpha.), onto a single coupling grating. From there, two waveguides located closely beside one another are used to introduce the beams into a coupler and the beams are superimposed and evaluated in a known manner. Thus, a position measuring device can be drastically reduced in its structural size with the aid of an integrated optical component.

Abstract: A position measuring apparatus for measuring the position of an object having an integrated optical circuit on a substrate comprising a first grating for diffracting a light beam into a reference bundle and a measuring bundle. The first grating couples the reference bundle to an input of a coupler and decouples the measuring bundle from the substrate. The measuring bundle is directed to a reflecting element on the object wherein the measuring bundle is reflected from the object. The coupler has means for inputting signals and for outputting signals wherein the input signals are brought into interference. A second grating couples the reflected measuring bundle to another input of the coupler. Detection means detect the outputs of the coupler and generate phase displaced signals representative of the outputs.

Abstract: A photoelectric measuring device for measuring the relative position between two objects utilizing interfering lightwave patterns is provided. Two diffraction gratings having an equal grid constants are provided to perpendicularly impinge beam bundles into circular coupling-in gratings of the integrated optical circuit. In addition, an integrated light source may be coupled-out of the integrated optical circuit.