Patents by Inventor Michael Altheim

Michael Altheim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser chamber insulator with sealed electrode feedthrough
    Patent number: 6661826
    Abstract: A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: December 9, 2003
    Assignee: Cymer, Inc.
    Inventors: Richard C. Ujazdowski, Timothy S. Dyer, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann
  • Laser chamber insulator with sealed electrode feedthrough
    Publication number: 20020196830
    Abstract: A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
    Type: Application
    Filed: June 7, 2002
    Publication date: December 26, 2002
    Inventors: Richard C. Ujazdowski, Timothy S. Dyer, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann