Patents by Inventor Michael Andrew CARCASI

Michael Andrew CARCASI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir
    Patent number: 10048587
    Abstract: An apparatus for dispensing a liquid onto a substrate may comprise a reservoir for storing the liquid to be dispensed; a filter comprising an inlet and an outlet, the filter inlet in fluidic communication with the reservoir via a first valve; a dosing pump comprising an inlet, a first outlet, and a second outlet, the dosing pump inlet in fluidic communication with the reservoir and the dosing pump second outlet in fluidic communication with the filter inlet via a second valve, the dosing pump configured to dose an amount of the liquid and pump the liquid; and a dispense nozzle in fluidic communication with the dosing pump first outlet, the dispense nozzle configured to dispense the liquid onto the substrate.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: August 14, 2018
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Michael Andrew Carcasi, Wallace Paul Printz, Joshua Steven Hooge
  • METHOD AND APPARATUS FOR INCREASED RECIRCULATION AND FILTRATION IN A PHOTORESIST DISPENSE SYSTEM USING A LIQUID EMPTY RESERVOIR
    Publication number: 20150328650
    Abstract: An apparatus for dispensing a liquid onto a substrate may comprise a reservoir for storing the liquid to be dispensed; a filter comprising an inlet and an outlet, the filter inlet in fluidic communication with the reservoir via a first valve; a dosing pump comprising an inlet, a first outlet, and a second outlet, the dosing pump inlet in fluidic communication with the reservoir and the dosing pump second outlet in fluidic communication with the filter inlet via a second valve, the dosing pump configured to dose an amount of the liquid and pump the liquid; and a dispense nozzle in fluidic communication with the dosing pump first outlet, the dispense nozzle configured to dispense the liquid onto the substrate.
    Type: Application
    Filed: May 15, 2015
    Publication date: November 19, 2015
    Inventors: Michael Andrew CARCASI, Wallace Paul PRINTZ, Joshua Steven HOOGE
  • METHOD AND APPARATUS FOR INCREASED RECIRCULATION AND FILTRATION IN A PHOTORESIST DISPENSE SYSTEM USING A RECIRCULATION PUMP/LOOP
    Publication number: 20150331322
    Abstract: An apparatus for dispensing a liquid onto a substrate may comprise a reservoir for storing the liquid to be dispensed; a filter comprising an inlet and an outlet, the filter inlet in fluidic communication with the reservoir via a first valve; a dosing pump comprising an inlet, a first outlet, and a second outlet, the dosing pump inlet in fluidic communication with the reservoir and the dosing pump second outlet in fluidic communication with the filter inlet via a second valve, the dosing pump configured to dose an amount of the liquid and pump the liquid; and a dispense nozzle in fluidic communication with the dosing pump first outlet, the dispense nozzle configured to dispense the liquid onto the substrate.
    Type: Application
    Filed: May 15, 2015
    Publication date: November 19, 2015
    Inventors: Michael Andrew CARCASI, Wallace Paul PRINTZ, Joshua Steven HOOGE
  • METHOD AND APPARATUS FOR MULTIPLE RECIRCULATION AND FILTRATION CYCLES PER DISPENSE IN A PHOTORESIST DISPENSE SYSTEM
    Publication number: 20150328649
    Abstract: An apparatus for dispensing a liquid onto a substrate may comprise a reservoir for storing the liquid to be dispensed; a filter comprising an inlet and an outlet, the filter inlet in fluidic communication with the reservoir via a first valve; a dosing pump comprising an inlet, a first outlet, and a second outlet, the dosing pump inlet in fluidic communication with the reservoir and the dosing pump second outlet in fluidic communication with the filter inlet via a second valve, the dosing pump configured to dose an amount of the liquid and pump the liquid; and a dispense nozzle in fluidic communication with the dosing pump first outlet, the dispense nozzle configured to dispense the liquid onto the substrate.
    Type: Application
    Filed: May 15, 2015
    Publication date: November 19, 2015
    Inventors: Michael Andrew CARCASI, Wallace Paul PRINTZ, Joshua Steven HOOGE