Abstract: A method for casting a reactive material PVD target, as well as targets thus obtained and a mold for casting. The method includes providing a mold defining an opening, placing a reactive material ingot in to a reservoir (140) proximate the mold, forming a vacuum and melting the reactive material in the reservoir, heating the mold to above a casting temperature and forming a vacuum therein, introducing molten reactive material from the reservoir into the opening and cooling the mold to form the PVD target.

Abstract: A method for casting a reactive material PVD target, as well as targets thus obtained and a mold for casting. The method includes providing a mold defining an opening, placing a reactive material ingot in to a reservoir (140) proximate the mold, forming a vacuum and melting the reactive material in the reservoir, heating the mold to above a casting temperature and forming a vacuum therein, introducing molten reactive material from the reservoir into the opening and cooling the mold to form the PVD target.

Abstract: A gravity-fed in-line continuous processing system includes at least one processing chamber disposed between a first load lock and a second load lock. The second load lock is disposed lower than the first load lock. A first device isolates the processing chamber from the first load lock. A second device isolates the processing chamber from the second load lock. There is at least one track through the processing chamber and the first and second load locks. The track is structured and arranged such that an article slides thereon under the force of gravity.

Abstract: A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.

Abstract: A rotary barrel gate valve includes a body and at least one passage through the body defining an inlet and an outlet. There is a first actuator for rotating the body, a second actuator for translating the body, and a sealing portion on the body which seals the body with respect to an opening into a chamber adjacent the body.

Abstract: A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.

Abstract: A rotary barrel gate valve includes a body and at least one passage through the body defining an inlet and an outlet. There is a first actuator for rotating the body, a second actuator for translating the body, and a sealing portion on the body which seals the body with respect to an opening into a chamber adjacent the body.

Abstract: A gravity-fed in-line continuous processing system includes at least one processing chamber disposed between a first load lock and a second load lock. The second load lock is disposed lower than the first load lock. A first device isolates the processing chamber from the first load lock. A second device isolates the processing chamber from the second load lock. There is at least one track through the processing chamber and the first and second load locks. The track is structured and arranged such that an article slides thereon under the force of gravity.