Patents by Inventor Michael B. Biche

Michael B. Biche has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal control line for delivering liquid to a point of use in a photolithography system
    Patent number: 5427820
    Abstract: An apparatus and method for dispensing liquid at a controlled temperature in a spin coating or developer machine are disclosed. The apparatus is a thermal control line that has an inner core wall that encloses at least one conduit for a liquid dispense line and an outer annular wall that encloses at least one chamber for circulation of coolant. The inner core wall and the outer annular wall are formed of such materials as to permit efficient heat exchange between the coolant and the liquid. The coolant is circulated in the annular chamber at a rate sufficient to maintain the dispensed liquid at a desired temperature.
    Type: Grant
    Filed: July 16, 1993
    Date of Patent: June 27, 1995
    Assignee: Semiconductor Systems, Inc.
    Inventors: Michael B. Biche, Vuong P. Nguyen