Patents by Inventor Michael B. Binnad

Michael B. Binnad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus to allow a plurality of stages to operate in close proximity
    Patent number: 9030057
    Abstract: According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
    Type: Grant
    Filed: June 19, 2012
    Date of Patent: May 12, 2015
    Assignee: Nikon Corporation
    Inventors: Michael B. Binnad, Pai-Hsueh Yang
  • Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity
    Publication number: 20120328836
    Abstract: According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis.
    Type: Application
    Filed: June 19, 2012
    Publication date: December 27, 2012
    Applicant: Nikon Corporation
    Inventors: Michael B. Binnad, Pai-Hsueh Yang