Patents by Inventor Michael B. Ferrara

Michael B. Ferrara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration standard for calibrating a defect inspection system and a method of forming same
    Patent number: 5691812
    Abstract: The calibration standard has artificial defects of a predetermined uniform size disposed on selected areas of a substrate. The artificial defects are randomly spaced within the selected area and of a sufficient density as to be visually discernable through a CRT display or other output device. The selected areas in which the artificial defects are disposed are formed by positioning a mask above the substrate. The open areas of the mask correspond to the selected areas on which the artificial defects are disposed. The form of these open areas may correspond to a character representing the predetermined size of the artificial defect. If this is the case, the operator can determine the size of the artificial defects on a substrate without reference to any external source.
    Type: Grant
    Filed: March 22, 1996
    Date of Patent: November 25, 1997
    Assignee: ADE Optical Systems Corporation
    Inventors: Eugene C. Bates, Michael B. Ferrara