Patents by Inventor Michael Barthman

Michael Barthman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for abating effluent from an etching process
    Patent number: 8097179
    Abstract: A method for abating effluent from an etching process in one embodiment includes advancing etch gas product into a passageway of a gas connector in direct fluid communication with a first chamber of an interior void of an apparatus, advancing a gas from a gas source into said passageway of said gas connector at the same time said etch gas product is being advanced into said passageway, and advancing humidified gas from a humidified gas source into a second chamber of said interior void.
    Type: Grant
    Filed: July 13, 2009
    Date of Patent: January 17, 2012
    Assignee: LSI Corporation
    Inventors: Michael Williams, Michael Barthman
  • Arrangement and method for abating effluent from a process
    Patent number: 7578883
    Abstract: An arrangement and associated method for abating effluent from an etching process is disclosed.
    Type: Grant
    Filed: August 29, 2001
    Date of Patent: August 25, 2009
    Assignee: LSI Corporation
    Inventors: Michael Williams, Michael Barthman