Abstract: A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.

Abstract: A multi-beam charged particle system and a method of setting a working distance WD of the multi beam charged particle system are provided. With the method, the working distance is adjusted while the imaging performance of a wafer inspection task is maintained by computing parameter values of components from predetermined calibration parameter values. The method can allow a relatively fast wafer inspection task even with a wafer stage with a fixed z-position parallel to an optical axis of the multi-beam charged particle system.

Abstract: A multi-beam charged particle inspection system and a method of operating a multi-beam charged particle inspection system for wafer inspection can provide high throughput with high resolution and high reliability. The method and the multi-beam charged particle beam inspection system can be configured to extract from a plurality of sensor data a set of control signals to control the multi-beam charged particle beam inspection system and thereby maintain the imaging specifications including a movement of a wafer stage during the wafer inspection task.

Abstract: The disclosure provides an interior trim part for a motor vehicle having a sliding or panoramic roof comprising a headliner and a stiffening frame attached to the headliner and enclosing and stabilizing an opening in the headliner enclosing the sliding or panoramic window, the stiffening frame being made of a fiber-reinforced composite material comprising a fiber mat and a textile lattice material, the textile lattice material being applied over a surface of the fiber mat and impregnated together therewith.

Abstract: A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.

Abstract: A method for operating a multi-beam particle microscope in an inspection mode of operation and an associated multi-beam particle microscope are disclosed, wherein a detection unit comprises an image generation detection region with fixedly assigned detection channels and an adjustment detection region with additional detection channels. The fixedly assigned detection channels and the additional detection channels are in the same detection plane. Based on signals obtained via the additional detection channels, it is possible to correct an incidence position of the secondary beams on the detection unit in real time, to be precise independently of the specific structure of the detection unit.

Abstract: A method for operating a multi-beam particle microscope which operates using a plurality of individual charged particle beams, wherein the method includes the following steps: measuring the beam current; determining a deviation of the measured beam current from a nominal beam current; decomposing the determined deviation into a drift component and into a high-frequency component; and controlling the high-frequency component of the beam current via a first closed-loop beam current control mechanism and/or compensating an effect of the high-frequency component on a recording quality of the multi-beam particle microscope using different mechanism than a closed-loop beam current control mechanism. An electrostatic control lens arranged in the beam generating system between extractor and anode can be used as first closed-loop beam current control mechanism. Adapting an extractor voltage of the beam generating system can be avoided.

Abstract: A multi-beam charged particle system and a method of setting a working distance WD of the multi beam charged particle system are provided. With the method, the working distance is adjusted while the imaging performance of a wafer inspection task is maintained by computing parameter values of components from predetermined calibration parameter values. The method can allow a relatively fast wafer inspection task even with a wafer stage with a fixed z-position parallel to an optical axis of the multi-beam charged particle system.

Abstract: A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.

Abstract: A multi-beam charged particle inspection system and a method of operating a multi-beam charged particle inspection system for wafer inspection can provide high throughput with high resolution and high reliability. The method and the multi-beam charged particle beam inspection system can be configured to extract from a plurality of sensor data a set of control signals to control the multi-beam charged particle beam inspection system and thereby maintain the imaging specifications including a movement of a wafer stage during the wafer inspection task.

Abstract: The disclosure provides an interior trim part for a motor vehicle having a sliding or panoramic roof comprising a headliner and a stiffening frame attached to the headliner and enclosing and stabilizing an opening in the headliner enclosing the sliding or panoramic window, the stiffening frame being made of a fiber-reinforced composite material comprising a fiber mat and a textile lattice material, the textile lattice material being applied over a surface of the fiber mat and impregnated together therewith.

Abstract: A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.

Abstract: A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.

Abstract: A manufacturing action is performed on a first part or first component involved in a manufacturing process. The manufacturing action is directed by computer software that is stored in a memory and executed by a processor. The first part or first component is examined to determine results of the manufacturing action. Based upon the results, a structure of the computer software is selectively changed to optimize the results. Subsequently the manufacturing action is performed on a second part or second component. The manufacturing action is directed by the computer software having the changed structure.

Abstract: The invention relates to an interior trim component for a motor vehicle, which comprises: a carrier component, which determines the contour of the interior trim component, a cover layer, which is applied to a front side of the carrier component, and a light-emitting layer, which is applied to a back side of the carrier component, wherein the carrier component and the cover layer are transparent.

Abstract: Asset performance management (APM) information associated with an industrial machine that is producing a product is obtained. At least one of machine operation information and output characteristic information is received from the industrial machine. The APM information, the machine operation information, and the output characteristic information are stored in a database at the cloud (or some other remote computing device or network). The APM information, the machine operation information, and the output characteristic information are analyzed at the cloud to identify in real-time changes to the operation of the machine needed to improve the performance of the industrial machine. In some aspects, the changes are presented to a user and the changes are acted upon.

Abstract: A manufacturing action is performed on a first part or first component involved in a manufacturing process. The manufacturing action is directed by computer software that is stored in a memory and executed by a processor. The first part or first component is examined to determine results of the manufacturing action. Based upon the results, a structure of the computer software is selectively changed to optimize the results. Subsequently the manufacturing action is performed on a second part or second component. The manufacturing action is directed by the computer software having the changed structure.

Abstract: The invention relates to an interior lining for a motor vehicle, with a sliding or panoramic roof, which comprises a roof liner and a stiffening frame which is attached to the roof liner, and an opening in the roof liner, which delimits, frames and stabilizes the sliding or panoramic window. The roof liner is constructed in several layers, which comprise at least one core layer and one cover layer. The stiffening frame is produced from a fiber-reinforced composite material, which contains organic synthetic polymer fibers, carbon fibers or natural fibers, or mixtures of these fibers, and a binder made from a duroplastic or thermoplastic material. The surface weight and the bending stiffness of the stiffening frame are greater than those of the roof liner structure, preferably by at least 50%.

Abstract: The invention relates to an interior trim component for a motor vehicle, which comprises: a carrier component, which determines the contour of the interior trim component, a cover layer, which is applied to a front side of the carrier component, and a light-emitting layer, which is applied to a back side of the carrier component, wherein the carrier component and the cover layer are transparent.

Abstract: The invention relates to an interior lining for a motor vehicle, with a sliding or panoramic roof, which comprises a roof liner and a stiffening frame which is attached to the roof liner, and an opening in the roof liner, which delimits, frames and stabilizes the sliding or panoramic window. The roof liner is constructed in several layers, which comprise at least one core layer and one cover layer. The stiffening frame is produced from a fiber-reinforced composite material, which contains organic synthetic polymer fibers, carbon fibers or natural fibers, or mixtures of these fibers, and a binder made from a duroplastic or thermoplastic material. The surface weight and the bending stiffness of the stiffening frame are greater than those of the roof liner structure, preferably by at least 50%.