Patents by Inventor Michael Biviano

Michael Biviano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP Pad Analyzer
    Publication number: 20060258264
    Abstract: An ultrasonic CMP polishing pad analyzer is disclosed. The analyzer provides a manufacturer or other user an ability to inspect a CMP polishing pad without removing the pad from the CMP machine by creating and displaying a topographical image of an in-service polishing pad. The analyzer includes an ultrasonic transducer and an analyzer body mounted to the CMP machine such that the ultrasonic transducer is positioned to receive reflected ultrasonic signals from a surface of the polishing pad.
    Type: Application
    Filed: May 12, 2006
    Publication date: November 16, 2006
    Applicant: THE ULTRAN GROUP, INC.
    Inventors: Thomas Eischeid, Michael Biviano, Bradley Oaks, Raghu Srivatsa, Mahesh Bhardwaj