Patents by Inventor Michael Boy

Michael Boy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11972986
    Abstract: Semiconductor wafers are produced by a process wherein a single-crystal ingot of semiconductor material is pulled and at least one wafer is removed from the ingot, wherein the wafer is subjected to a thermal treatment comprising a heat treatment step in which a radial temperature gradient acts on the wafer, wherein an analysis of the wafer of semiconductor material with respect to the formation of defects in the crystal lattice, so-called stress fields, is carried out.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: April 30, 2024
    Assignee: Siltronic AG
    Inventors: Michael Boy, Christina Kruegler
  • Patent number: 11639558
    Abstract: A method produces a single-crystal silicon semiconductor wafer. A single-crystal silicon substrate wafer is double side polished. A front side of the substrate wafer is chemical mechanical polished (CMP). An epitaxial layer of single-crystal silicon is deposited on the front side of the substrate wafer. A first rapid thermal anneal (RTA) treatment is performed on the coated substrate wafer at 1275-1295° C. for 15-30 seconds in argon and oxygen, having oxygen of 0.5-2.0 vol %. The coated substrate wafer is then cooled at or below 800° C., with 100 vol % argon. A second RTA treatment is performed on the coated substrate wafer at a 1280-1300° C. for 20-35 seconds in argon. An oxide layer is removed from a front side of the coated substrate wafer. The front side of the coated substrate wafer is polished by CMP.
    Type: Grant
    Filed: July 7, 2022
    Date of Patent: May 2, 2023
    Assignee: SILTRONIC AG
    Inventors: Timo Mueller, Michael Boy, Michael Gehmlich, Andreas Sattler
  • Publication number: 20220402160
    Abstract: A saw apparatus includes a guide bar, a chain driver, and an endless cutting chain trained about the guide bar and the chain driver. A hydraulic chain tensioning apparatus has a hydraulic actuator configured to be driven by a hydraulic power source to act against the guide bar to maintain tension in the cutting chain. A tension release valve is provided between the hydraulic power source and the hydraulic actuator. The tension release valve has a check valve, and a manual override press-button configured to maintain the check valve in an open condition while depressed. The tension release valve has a spring detent configured to maintain the manual override press-button in a depressed condition until selectively released.
    Type: Application
    Filed: June 20, 2022
    Publication date: December 22, 2022
    Inventors: Michael BOYS, James HOWORTH
  • Publication number: 20220349089
    Abstract: A method produces a single-crystal silicon semiconductor wafer. A single-crystal silicon substrate wafer is double side polished. A front side of the substrate wafer is chemical mechanical polished (CMP). An epitaxial layer of single-crystal silicon is deposited on the front side of the substrate wafer. A first rapid thermal anneal (RTA) treatment is performed on the coated substrate wafer at 1275-1295° C. for 15-30 seconds in argon and oxygen, having oxygen of 0.5-2.0 vol %. The coated substrate wafer is then cooled at or below 800° C., with 100 vol % argon. A second RTA treatment is performed on the coated substrate wafer at a 1280-1300° C. for 20-35 seconds in argon. An oxide layer is removed from a front side of the coated substrate wafer. The front side of the coated substrate wafer is polished by CMP.
    Type: Application
    Filed: July 7, 2022
    Publication date: November 3, 2022
    Inventors: Timo Mueller, Michael Boy, Michael Gehmlich, Andreas Sattler
  • Publication number: 20220236205
    Abstract: Suitability of silicon wafers for use in device processing without generation of fatal defects is assessed by using SIRD to measure stress in a wafer cut from a piece of a crystal ingot after first and second thermal treatments of the water, the second thermal treatment consisting of a heating phase, a holding phase, and a cooling phase. The result is used to consider whether silicon wafers cut from the piece can adequately survive device processing without generating excess defects.
    Type: Application
    Filed: April 30, 2020
    Publication date: July 28, 2022
    Applicant: SILTRONIC AG
    Inventors: Michael BOY, Ludwig KOESTER, Elena SOYKA, Peter STORCK
  • Publication number: 20210111080
    Abstract: Semiconductor wafers are produced by a process wherein a single-crystal ingot of semiconductor material is pulled and at least one wafer is removed from the ingot, wherein the wafer is subjected to a thermal treatment comprising a heat treatment step in which a radial temperature gradient acts on the wafer, wherein an analysis of the wafer of semiconductor material with respect to the formation of defects in the crystal lattice, so-called stress fields, is carried out.
    Type: Application
    Filed: March 13, 2019
    Publication date: April 15, 2021
    Applicant: Siltronic AG
    Inventors: Michael BOY, Christina KRUEGLER
  • Publication number: 20200248333
    Abstract: A semiconductor wafer of single-crystal silicon includes: a polished front side and a back side; a denuded zone, which extends from the polished front side toward the back side to a depth of not less than 45 ?m; and a region adjacent to the denuded zone, the region having bulk micro defect (BMD) seeds, which are capable of being developed into BMDs. A density of the BMDs at a distance of 120 ?m from the front side is not less than 3×109 cm?3.
    Type: Application
    Filed: October 9, 2018
    Publication date: August 6, 2020
    Inventors: Timo Mueller, Michael Boy, Michael Gehmlich, Andreas Sattler
  • Patent number: 10238045
    Abstract: A timber-working device having a first pivoting drive arm and a second pivoting drive arm, and a timing link for connecting them. The timing link includes an elongate member having a first end and a second end. A first aperture is at the first end and a second aperture at the second end. At least one of the first aperture and the second aperture is elongate along the length of the member.
    Type: Grant
    Filed: November 29, 2013
    Date of Patent: March 26, 2019
    Assignee: Waratah NZ Limited
    Inventors: Michael Boys, Justyn Peter Smythe
  • Publication number: 20170020085
    Abstract: A timber-working device having a first pivoting drive arm and a second pivoting drive arm, and a timing link for connecting them. The timing link includes an elongate member having a first end and a second end. A first aperture is at the first end and a second aperture at the second end. At least one of the first aperture and the second aperture is elongate along the length of the member.
    Type: Application
    Filed: November 29, 2013
    Publication date: January 26, 2017
    Inventors: Michael Boys, Justyn Peter Smythe
  • Patent number: 5759903
    Abstract: A circuit structure having at least one capacitor and a method for the manufacture thereof. The capacitor is constructed of a doped, single-crystal silicon substrate (1) that is provided with a plurality of hole openings (3) by electrochemical etching in a fluoride-containing, acidic electrolyte wherein the substrate is connected as an anode. The capacitor is further constructed of a dielectric layer (4) and of a conductive layer (5) as a cooperating electrode.
    Type: Grant
    Filed: November 13, 1995
    Date of Patent: June 2, 1998
    Assignee: Siemens Aktiengesellschaft
    Inventors: Volker Lehmann, Michael Boy, Wolfgang Hoenlein