Abstract: The system includes a robot interface disposed on a robot arm, and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper jaw and the lower jaw are spaced apart in a first direction and biased together, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw. To exchange the end effector, the upper jaw and the lower jaw can be separated to release the robot interface.

Abstract: A wafer manipulator includes a first arm connected to a base, a second arm connected to the base, a first pad connected to the first arm, a second pad connected to the second arm, a light transmitter connected to the wafer manipulator, and a light sensor connected to the wafer manipulator. The light sensor is configured to receive light transmitted from the light transmitter when the wafer is not properly in contact with the wafer. The light sensor is configured to not receive light transmitted from the light transmitter when the wafer is properly in contact with the wafer manipulator. The first pad has a horizontal friction and a vertical friction. The horizontal friction is at least ten times greater than the vertical friction. Multiple pads can be attached to the first arm and multiple pads can be attached to the second arm.

Abstract: A wafer manipulator includes a first arm connected to a base, a second arm connected to the base, a first pad connected to the first arm, a second pad connected to the second arm, a light transmitter connected to the wafer manipulator, and a light sensor connected to the wafer manipulator. The light sensor is configured to receive light transmitted from the light transmitter when the wafer is not properly in contact with the wafer. The light sensor is configured to not receive light transmitted from the light transmitter when the wafer is properly in contact with the wafer manipulator. The first pad has a horizontal friction and a vertical friction. The horizontal friction is at least ten times greater than the vertical friction. Multiple pads can be attached to the first arm and multiple pads can be attached to the second arm.