Patents by Inventor Michael Byan Ball

Michael Byan Ball has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus
    Patent number: 6443822
    Abstract: A wafer processing apparatus and method of processing a wafer utilizing a processing slurry are provided. The wafer processing disk comprises a processing disk body and a plurality of processing teeth secured to the processing disk body. The plurality of processing teeth project from the disk body to define respective processing surfaces. The plurality of processing teeth include at least one pair of spaced adjacent teeth defining a processing channel there between. The processing channel is shaped such that the cross sectional area of the processing channel decreases as a function of its distance from the processing disk body.
    Type: Grant
    Filed: August 30, 2000
    Date of Patent: September 3, 2002
    Assignee: Micron Technology, Inc.
    Inventor: Michael Byan Ball