Patents by Inventor Michael C. Binder

Michael C. Binder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic fluorine control system
    Patent number: 6151349
    Abstract: An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F.sub.2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines .DELTA.E/.DELTA.V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on .DELTA.E/.DELTA.V without the need to actually measure the fluorine concentration.
    Type: Grant
    Filed: August 4, 1999
    Date of Patent: November 21, 2000
    Assignee: Cymer, Inc.
    Inventors: Mengxiong Gong, Jason R. Carlesi, Michael C. Binder, Palash P. Das
  • Automatic fluorine control system
    Patent number: 6028880
    Abstract: An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.
    Type: Grant
    Filed: July 2, 1998
    Date of Patent: February 22, 2000
    Assignee: Cymer, Inc.
    Inventors: Jason R. Carlesi, Shahryar Rokni, Mengxiong Gong, Tom A. Watson, Palash P. Das, Michael C. Binder, Muljadi Tantra, David J. Tammadge, Daniel G. Patterson