Abstract: A system for supplying a reagent to multiple tools in an electronics fabrication facility is configured using a demand probability distribution. In specific examples the reagent is a non-atmospheric or a specialty gas and the demand probability distribution is developed using Monte Carlo statistical techniques. In one embodiment, a method for configuring a reagent supply system for an electronic device manufacturing facility is provided. The method includes (a) collecting representative information for process tools within the fabrication facility which use the reagent; (b) creating a simulation of process tool operation to model an overall demand profile for the process tools; (c) creating a statistical probability distribution of the reagent demand by the process tools using data from the model; and (d) correlating data from the probability distribution with supply system characterization data to configure the supply system.

Abstract: A system for supplying a reagent to multiple tools in an electronics fabrication facility is configured using a demand probability distribution. In specific examples the reagent is a non-atmospheric or a specialty gas and the demand probability distribution is developed using Monte Carlo statistical techniques.

Abstract: A water column supervisory switch having a probe arrangement and probe circuitry for detecting the presence of a conductive medium that has reached a predetermined level above a clapper valve inside a dry pipe valve for a sprinkler system is disclosed. The probe arrangement comprises a housing and a probe operatively associated with probe circuitry that provides a means for activating an alarm when the conductive medium reaches the predetermined level in order for maintenance personnel to drain the water from the dry pipe valve.

Abstract: Systems and methods are provided that allow for the continued operation of a fire sprinkler or standpipe system after the failure of an air release valve, wherein connected to the air release valve is a system that collects and contains fire extinguishing liquid leaked from an air release valve, as well as being able to detect and stop such leaks that could not be contained by the system.

Abstract: A system for producing high and ultra high purity nitrogen comprising a first column for the production of nitrogen and a second column having a top condenser wherein boil off from the second column top condenser is turboexpanded to generate refrigeration for the system.