Abstract: An example test system includes: a manifold including fluid channels, where the fluid channels are for holding coolant; a quick disconnect mechanically coupled to the manifold, where the quick disconnect includes a channel for passing coolant between a fluid channel and a test board; a containment plate mechanically coupled to the manifold, and a cover over at least part of the quick disconnect, where the cover is hermetically sealed to the quick disconnect and to the containment plate to thereby form a containment chamber.

Abstract: An example test system includes: a pin electronics board for exchanging signals with a device under test (DUT), where the pin electronics board includes first electrical contacts; an interposer between the pin electronics board and a paddle board, where the paddle board includes second electrical contacts, and where the interposer includes electrical connectors for use in establishing electrical pathways between the first electrical contacts and the second electrical contacts; and an actuator configured to force the paddle board and the interposer to make contact so as to cause the electrical connectors to contact the second electrical contacts and thereby establish the electrical pathways.

Abstract: An example test system includes: a manifold including fluid channels, where the fluid channels are for holding coolant; a quick disconnect mechanically coupled to the manifold, where the quick disconnect includes a channel for passing coolant between a fluid channel and a test board; a containment plate mechanically coupled to the manifold, and a cover over at least part of the quick disconnect, where the cover is hermetically sealed to the quick disconnect and to the containment plate to thereby form a containment chamber.

Abstract: An example test system includes: a pin electronics board for exchanging signals with a device under test (DUT), where the pin electronics board includes first electrical contacts; an interposer between the pin electronics board and a paddle board, where the paddle board includes second electrical contacts, and where the interposer includes electrical connectors for use in establishing electrical pathways between the first electrical contacts and the second electrical contacts; and an actuator configured to force the paddle board and the interposer to make contact so as to cause the electrical connectors to contact the second electrical contacts and thereby establish the electrical pathways.

Abstract: This invention provides a manipulator for positioning a test head relative to a prober or other reference. The manipulator has a frame; a linkage coupled to the frame and including first and second links having freedom of rotation about respective pivots and a third link coupled to the first and second links such that the third link has translational and rotational degrees of freedom of movement; and an adaptor coupled to the third link and configured to attach to a test head. The invention also provides a method of controlling the manipulator.

Abstract: This invention provides a manipulator for positioning a test head relative to a prober or other reference. The manipulator has a frame; a linkage coupled to the frame and including first and second links having freedom of rotation about respective pivots and a third link coupled to the first and second links such that the third link has translational and rotational degrees of freedom of movement; and an adaptor coupled to the third link and configured to attach to a test head. The invention also provides a method of controlling the manipulator.

Abstract: This invention provides a manipulator for positioning a test head relative to a prober or other reference. The manipulator has a frame; a linkage coupled to the frame and including first and second links having freedom of rotation about respective pivots and a third link coupled to the first and second links such that the third link has translational and rotational degrees of freedom of movement; and an adaptor coupled to the third link and configured to attach to a test head. The invention also provides a method of controlling the manipulator.

Abstract: A probe assembly for use with a calibration/validation robot to calibrate/validate a plurality of semiconductor tester channels is disclosed. The probe assembly includes a bracket adapted for mounting to the robot and a probe element for engaging test points disposed on the semiconductor tester channels. A magnetic attach/release mechanism cooperates with the bracket and probe element to allow for the separation of the probe element from the bracket whenever the probe element meets a force that exceeds a predetermined value.

Abstract: A compliance assembly is disclosed for use in a semiconductor tester testhead stand. The compliance assembly includes an airspring having compliance along a plurality of axes and a containment vessel adapted for receiving the airspring. The containment vessel includes walls that, when the airspring is loaded, control the compliance along the plurality of axes.

Abstract: A probe assembly for use with a calibration/validation robot to calibrate/validate a plurality of semiconductor tester channels is disclosed. The probe assembly includes a bracket adapted for mounting to the robot and a probe element for engaging test points disposed on the semiconductor tester channels. A magnetic attach/release mechanism cooperates with the bracket and probe element to allow for the separation of the probe element from the bracket whenever the probe element meets a force that exceeds a predetermined value.

Abstract: A compliance assembly is disclosed for use in a semiconductor tester testhead stand. The compliance assembly includes an airspring having compliance along a plurality of axes and a containment vessel adapted for receiving the airspring. The containment vessel includes walls that, when the airspring is loaded, control the compliance along the plurality of axes.