Patents by Inventor Michael Caterer

Michael Caterer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for defining a pattern using an anti-reflective coating and structure therefor
    Patent number: 6030541
    Abstract: A pattern in a surface is defined by providing on the surface a hard mask material; depositing an anti-reflective coating on the hard mask material; applying a photoresist layer on the anti-reflective coating; patterning the photoresist layer, anti-reflective layer and hard mask material; and removing the remaining portions of the photoresist layer and anti-reflective layer; and then patterning the substrate using the hard mask as the mask. Also provided is a structure for defining a pattern in a surface which comprises a surface having a hard mask material thereon; an anti-reflective coating located on the hard mask material; and a photoresist located on the anti-reflective coating. Also provided is an etchant composition for removing the hard mask material which comprises an aqueous composition of HF and chlorine.
    Type: Grant
    Filed: June 19, 1998
    Date of Patent: February 29, 2000
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Michael Caterer, James T. Marsh, Hung Ng, James M. Oberschmidt, Jed H. Rankin