Patents by Inventor Michael Chafin

Michael Chafin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA CONTROL USING DUAL CATHODE FREQUENCY MIXING
    Publication number: 20070000611
    Abstract: A method and apparatus for controlling characteristics of a plasma in a semiconductor substrate processing chamber using a dual frequency RF source is provided. The method comprises supplying a first RF signal to a first electrode disposed in a processing chamber, and supplying a second RF signal to the first electrode, wherein an interaction between the first and second RF signals is used to control at least one characteristic of a plasma formed in the processing chamber.
    Type: Application
    Filed: September 11, 2006
    Publication date: January 4, 2007
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Steven Shannon, Dennis Grimard, Theodoros Panagopoulos, Daniel Hoffman, Michael Chafin, Troy Detrick, Alexander Paterson, Jingbao Liu, Taeho Shin, Bryan Pu
  • Plasma control using dual cathode frequency mixing
    Publication number: 20050090118
    Abstract: A method and apparatus for controlling characteristics of a plasma in a semiconductor substrate processing chamber using a dual frequency RF source is provided. The method comprises supplying a first RF signal to a first electrode disposed in a processing chamber, and supplying a second RF signal to the first electrode, wherein an interaction between the first and second RF signals is used to control at least one characteristic of a plasma formed in the processing chamber.
    Type: Application
    Filed: April 12, 2004
    Publication date: April 28, 2005
    Inventors: Steven Shannon, Dennis Grimard, Theodoros Panagopoulos, Daniel Hoffman, Michael Chafin, Troy Detrick, Alexander Paterson, Jingbao Liu, Taeho Shin, Bryan Pu