Patents by Inventor Michael Christopher Sarin

Michael Christopher Sarin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for mass flow controller verification
    Patent number: 9169975
    Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: October 27, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Michael Christopher Sarin, Rafael Mendez, Gregory M. Bartlett, Eric Hill, Keith R. Lawson, Andy Rosser
  • SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
    Publication number: 20140060147
    Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: ASM IP Holding B.V.
    Inventors: Michael Christopher Sarin, Rafael Mendez, Gregory Bartlett, Eric Hill, Keith R. Lawson, Andy Rosser