Patents by Inventor Michael Cisewski
Michael Cisewski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20160039659Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.Type: ApplicationFiled: July 30, 2015Publication date: February 11, 2016Inventors: Donald D. WARE, Glenn M. TOM, Paul DATHE, Amy KOLAND, Jason GEROLD, Kirk MIKKELSEN, Kevin T. O'DOUGHERTY, Michael A. CISEWSKI
-
Patent number: 9120616Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.Type: GrantFiled: December 13, 2012Date of Patent: September 1, 2015Assignee: Advanced Technology Materials, Inc.Inventors: Donald D. Ware, Glenn M. Tom, Paul Dathe, Amy Koland, Jason Gerold, Kirk Mikkelsen, Kevin T. O'Dougherty, Michael A. Cisewski
-
Patent number: 8613359Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: GrantFiled: July 30, 2012Date of Patent: December 24, 2013Assignee: Entegris, Inc.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
-
Publication number: 20130020220Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: ApplicationFiled: July 30, 2012Publication date: January 24, 2013Applicant: ENTEGRIS, INC.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
-
Publication number: 20130001245Abstract: To avoid problems associated with choke-off of a collapsible liner (e.g., disposed within a rigid overpack) during pressure dispensing of fluid therefrom, a pressure dispense package includes a choke prevention element comprising any of a perforated flange within the liner, a channel-defining flange within the liner, a film defining at least one liquid channel along an inner surface of the liner, a radial stiffening element coupled to the liner, an orifice-defining hollow internal support disposed within the liner, one or more magnetic and complementary magnetically responsive elements associated with the liner and surrounding container, or differential collapse characteristics between liner panels. Methods for preventing choke-off of a collapsible liner adapted for pressure dispensing are also provided.Type: ApplicationFiled: September 10, 2012Publication date: January 3, 2013Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Michael A. Cisewski, Paul Dathe, Donald D. Ware, Amy Koland
-
Patent number: 8336734Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.Type: GrantFiled: June 11, 2007Date of Patent: December 25, 2012Assignee: Advanced Technology Materials, Inc.Inventors: Donald D. Ware, Glenn M. Tom, Paul Dathe, Amy Koland, Jason Gerold, Kirk Mikkelsen, Kevin T. O'Dougherty, Michael A. Cisewski
-
Patent number: 8231005Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: GrantFiled: September 27, 2006Date of Patent: July 31, 2012Assignee: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
-
Publication number: 20100133292Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.Type: ApplicationFiled: June 11, 2007Publication date: June 3, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Donald D. Ware, Glenn M. Tom, Paul Dathe, Amy Koland, Jason Gerold, Kirk Mikkelsen, Kevin T. O'Dougherty, Michael A. Cisewski
-
Publication number: 20100025430Abstract: To avoid problems associated with choke-off of a collapsible liner (e.g., disposed within a rigid overpack) during pressure dispensing of fluid therefrom, a pressure dispense package includes a choke prevention element comprising any of a perforated flange within the liner, a channel-defining flange within the liner, a film defining at least one liquid channel along an inner surface of the liner, a radial stiffening element coupled to the liner, an orifice-defining hollow internal support disposed within the liner, one or more magnetic and complementary magnetically responsive elements associated with the liner and surrounding container, or differential collapse characteristics between liner panels. Methods for preventing choke-off of a collapsible liner adapted for pressure dispensing are also provided.Type: ApplicationFiled: January 30, 2008Publication date: February 4, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Michael A. Cisewski, Paul Dathe, Donald D. Ware, Amy Koland
-
Publication number: 20090301917Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: ApplicationFiled: September 27, 2006Publication date: December 10, 2009Applicant: ENTEGRIS, INC.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad