Patents by Inventor Michael Cull

Michael Cull has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for electron beam inspection of samples
    Patent number: 6943350
    Abstract: Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: September 13, 2005
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Michael Cull
  • Methods and apparatus for electron beam inspection of samples
    Publication number: 20040041095
    Abstract: Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.
    Type: Application
    Filed: October 8, 2002
    Publication date: March 4, 2004
    Applicant: KLA Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Michael Cull
  • Methods and apparatus for electron beam inspection of samples
    Patent number: 6677586
    Abstract: Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: January 13, 2004
    Assignee: KLA -Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Michael Cull