Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.

Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.

Abstract: A buffer system for a semiconductor device fabrication tool includes one or more retractable shelves, one or more sliding assemblies positionable above the one or more load ports of the semiconductor device fabrication tool, and one or more lifting assemblies. The one or more retractable shelves are configured to support sealable containers. The one or more sliding assemblies are configured to receive the sealable containers and are further configured to transport the sealable containers to one or more positions beneath the one or more retractable shelves. The one or more lifting assemblies are configured to transport the sealable containers between any two of the group including one or more retractable shelves, the one or more sliding assemblies, and the one or more load ports.

Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.

Abstract: A buffer system for a semiconductor device fabrication tool includes one or more retractable shelves, one or more sliding assemblies positionable above the one or more load ports of the semiconductor device fabrication tool, and one or more lifting assemblies. The one or more retractable shelves are configured to support sealable containers. The one or more sliding assemblies are configured to receive the sealable containers and are further configured to transport the sealable containers to one or more positions beneath the one or more retractable shelves. The one or more lifting assemblies are configured to transport the sealable containers between any two of the group including one or more retractable shelves, the one or more sliding assemblies, and the one or more load ports.

Abstract: A transport system is provided to move an article from a conveyance section to a location. The conveyance section transports the article using a pair of transport belts. A lift lowers the article downward between the pair of transport belts. A hoist translates the article beneath the conveyance section to the location while supporting the article from above. The article may include a FOUP, semiconductor wafer, substrate for the manufacture of display devices or photovoltaics. The hoist may comprise a carriage and a gripper configured to grasp and vertically move the article while suspended beneath the carriage.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A system for buffering articles in transport is provided. The system comprises a buffer module configured to buffer articles and a computing system. The buffer module includes a first conveyor configured to transport the articles and a transference node configured to transfer the articles between the first conveyor and an external location. The computing system is configured to maintain an inventory list including a present location of each of the articles buffered by the buffer module. The computing system is further configured to control operation of the buffer module to transfer a selected article among the buffered articles to the external location.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: Systems and methods are provided for transporting articles throughout a fabrication facility according to assigned priority levels. Systems of the present invention are directed to conveyor systems that may include parallel conveyors and nodes where articles can be switched between conveyors. Accordingly, high priority articles can be routed around traffic by switching between parallel conveyors and/or lower priority articles can be rerouted or buffered to make a chosen route for a high priority article less congested. Methods are directed to selecting the most appropriate route for an article amongst the various possible routing alternatives.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

Abstract: A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container.